光学学报, 1984, 4 (12): 1067, 网络出版: 2011-09-15
部分相干成像下的空间线宽确定
Determination of spatial linewidth with partially coherent imagery
摘要
经过推导,得到部分相干照明条件下轴对称光学系统的直边阈值表达式;对有限扫描缝宽,也得到相应的直边阈值.提出确定阈值的方法;并对复振幅直达线条像进行数值计算,结果表明,阈值表达式与计算值相符,准确度达到0.01μm.
Abstract
In this paper, the straight-edge-threshold in an axis-symmetrical imaging system is deduced based on the theory of partial coherence, and the effect of the scanning slit width is also considered. An experimental method is discussed with a π phase edge plate. The comparison of the calculated value and the threshold shows a good agreement. The location accuracy reaches to 0.01μm.
杨健, 伍树东, 王之江. 部分相干成像下的空间线宽确定[J]. 光学学报, 1984, 4(12): 1067. YANG JIAN, WU SHUDONG, WANG ZHIJIANG. Determination of spatial linewidth with partially coherent imagery[J]. Acta Optica Sinica, 1984, 4(12): 1067.
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