Chinese Optics Letters, 2015, 13 (10): 100701, Published Online: Sep. 13, 2018  

Digital holographic shape measurement using Fizeau microscopy Download: 738次

Author Affiliations
1 State Key Laboratory of Transient Optics and Photonics, Xi’an Institute of Optics and Precision Mechanics, Chinese Academy of Sciences, Xi’an 710119, China
2 Engineering and Surface Metrology Laboratory, National Institute of Standards, Tersa St., El haram, El Giza, Egypt
3 Division of Mechanical System Engineering, Chonbuk National University, Jeonju 561-756, Republic of Korea
Abstract
We present a Fizeau interferometer using a microscopic objective as a tool for surface contouring without the need for a numerical lens for reconstruction. The interferometer is associated with a telescope system to feature the object with collimated light. The experiment is conducted on two objects possessing different step heights. The phase maps from the captured off-axis holograms are calculated numerically, which allows us to deduce the contours of the objects. The great advantages of the presented technique are that it can be done in real time and there is no need for numerical lenses for micro-objects reconstruction.

D. G. Abdelsalam, Junwei Min, Daesuk Kim, Baoli Yao. Digital holographic shape measurement using Fizeau microscopy[J]. Chinese Optics Letters, 2015, 13(10): 100701.

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