研发了基于Fabry-Perot激光谐振腔的量子真空计量装置,利用拍频和PDH(Pound Drever Hall)激光锁频技术,精确测量了充气前后腔内谐振激光的频率变化。在温度为299.1485 K,真空度为10 2~10 5 Pa的条件下,对干燥Ar折射率进行了测量;结合电容薄膜真空计的测量结果,得到折射率与真空度之间的相关系数为2.50835×10 -9,并对比分析了反演真空度与测量结果之间的差异,最后评定了激光频率不确定度及折射率和真空度测量不确定度。结果显示,激光频率不确定度为5×10 -12,折射率测量不确定度为1.64×10 -8, 真空度测量不确定度为2.5×10 -4。所研制的基于Fabry-Perot激光谐振腔的量子真空测量装置初步实现了量子化真空测量,对我国量子真空计量技术的研究提供了参考。

We develop a quantum vacuum measurement device based on a Fabry-Perot laser resonant cavity and use the beat frequency and the Pound Drever Hall (PDH) laser frequency-locking technology to accurately measure the change of resonant frequency in the cavity before and after inflation. The refractive index of dry Ar at the temperature of 299.1485 K and the vacuum degree of 10 ²-10 ⁵ Pa is measured. With the measurement result by the capacitance diaphragm vacuum meter, we get the relation coefficient of 2.50835×10 ^-9 between refractive index and vacuum degree. In addition, we compare and analyze the difference between the retrieved and measured vacuum degrees, and finally, we evaluate the laser frequency uncertainty as well as the refractive index and vacuum measurement uncertainty. The results show that the laser frequency uncertainty is 5×10 ^-12, the refractive index measurement uncertainty is 1.64×10 ^-8, and the vacuum measurement uncertainty is 2.5×10 ^-4. The developed quantum vacuum measurement device based on the Fabry-Perot laser resonator has been used to realize the quantum vacuum measurement, which provides some reference for the research of quantum vacuum measurement technologies in China.