采用室温溅射沉积和空气热氧化方法低成本地制备出纳米结构热致变色节能薄膜。利用扫描电子显微镜、X射线衍射仪、激光拉曼光谱仪和红外光谱分析仪等对其特性进行测试分析，研究了热氧化退火与VO2薄膜的微结构和热致红外开关特性的内在关系，找出了直接影响薄膜的晶粒尺寸、晶格结构、组分、热滞回线和红外透射比等的主要因素及其控制方法，获得了最佳工艺参数并在玻璃上制备出高能效的纳米VO2热致变色节能薄膜。根据X射线衍射谱和拉曼光谱结果，利用相关公式计算得到VO2的平均晶粒大小约为45 nm。薄膜在2.5 μm波长处相变前后红外透射比差量超过50%，相变温度为39 ℃，可见光透射比约达53%，显示了很好的热致变色性能。

The low cost nanostructure thermochromic energy-saving thin films are fabricated by magnetron sputtering deposition at room temperature and oxidation in air atomsphere. The film properties are studied through SEM, XRD, Raman spectroscopy and infrared spectrum analyzer. The relation between the oxidation annealing and microstructure and infrared switching characteristics of VO2 thin films with temperature are analyzed. The major factors which affect the film properties such as the grain size, crystal lattice structure, composition, thermal hysteresis and infrared transmittance and their control methods are obtained. The optimal processing parameters are used to fabricate VO2 nanostructure thermochromic energy-saving thin films on glass with high energy efficiency. The average grain size of VO2 nanocrystals is about 45 nm, calculated by the correlation equation based on XRD and Raman spectrometer. The measured results shows that the infrared light transmittance at 2.5 μm is more than 50%, the phase transition temperature is 39 ℃, visible light transmittance is about 53%, and the VO2 nanostructure energy-saving thin film have good thermochromic properties.