3自由度精密定位平台的运动特性和优化设计
胡俊峰, 张宪民. 3自由度精密定位平台的运动特性和优化设计[J]. 光学 精密工程, 2012, 20(12): 2686.
HU Jun-feng, ZHANG Xian-min. Kinematical properties and optimal design of 3-DOF precision positioning stage[J]. Optics and Precision Engineering, 2012, 20(12): 2686.
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胡俊峰, 张宪民. 3自由度精密定位平台的运动特性和优化设计[J]. 光学 精密工程, 2012, 20(12): 2686. HU Jun-feng, ZHANG Xian-min. Kinematical properties and optimal design of 3-DOF precision positioning stage[J]. Optics and Precision Engineering, 2012, 20(12): 2686.