光电子快报(英文版), 2023, 19 (3): 139, Published Online: Mar. 18, 2023
Silicon waveguide-based single cavity Fano resonance temperature sensor
Abstract
A compact Fano resonant temperature sensor composed of a micro-ring resonator (MRR) coupled double-T-shaped waveguide is developed. The coupling gap and coefficient of the device are optimized by the finite difference time domain (FDTD) method. The maximum slope ratio (SR) of the MRR-coupled single-T-shaped waveguide is -2.13 dB/nm. The SR of the double-T-shaped waveguide is -49.69 dB/nm which is 23 times that of the single-T-shaped waveguide. The simulation results show that the temperature sensitivity of optical intensity decreases with increasing temperature in the range from 303.6 K to 343.8 K. The wavelength-temperature sensitivity of the double-T-shaped waveguide microring is 76.5 pm/K. After introducing the double-T-shaped waveguide structure, the device's performance is greatly improved, and the double-T-shaped waveguide has a good application prospect as a temperature sensor.
WANG Shuai, LU Wenda, LAI Xiaohan, WANG Hong, ZHU Lianqing, and LU Lidan. Silicon waveguide-based single cavity Fano resonance temperature sensor[J]. 光电子快报(英文版), 2023, 19(3): 139.