光电子快报(英文版), 2023, 19 (3): 139, Published Online: Mar. 18, 2023  

Silicon waveguide-based single cavity Fano resonance temperature sensor

Author Affiliations
Key Laboratory of the Ministry of Education for Optoelectronic Measurement Technology and Instrument, Beijing Information Science and Technology University, Beijing 100059, China
Abstract
A compact Fano resonant temperature sensor composed of a micro-ring resonator (MRR) coupled double-T-shaped waveguide is developed. The coupling gap and coefficient of the device are optimized by the finite difference time domain (FDTD) method. The maximum slope ratio (SR) of the MRR-coupled single-T-shaped waveguide is -2.13 dB/nm. The SR of the double-T-shaped waveguide is -49.69 dB/nm which is 23 times that of the single-T-shaped waveguide. The simulation results show that the temperature sensitivity of optical intensity decreases with increasing temperature in the range from 303.6 K to 343.8 K. The wavelength-temperature sensitivity of the double-T-shaped waveguide microring is 76.5 pm/K. After introducing the double-T-shaped waveguide structure, the device's performance is greatly improved, and the double-T-shaped waveguide has a good application prospect as a temperature sensor.

WANG Shuai, LU Wenda, LAI Xiaohan, WANG Hong, ZHU Lianqing, and LU Lidan. Silicon waveguide-based single cavity Fano resonance temperature sensor[J]. 光电子快报(英文版), 2023, 19(3): 139.

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