[1] L C Hale, R M Hudyma, J S Taylor, et al.. High-NA camera for an EUVL microstepper[C]. 15th Annual Americal Society for Precision Engineering, 2000, 521-524.

[2] R A Paquin. Dimensional stability: an overview[C]. SPIE, 1990, 1335: 2-19.

[3] D Malacara. Optical Shop Testing[M]. New York: A John Wiler & Sons Inc, 2007.

[4] Zhang Baodong, Qin Shiqiao, Wang Xingshu. Accurate and fast simulation of Kolmogorov phase screen by combining spectral method with Zernike polynomials menthod[J]. Chin Opt Lett, 2010, 8(10): 969-971.

[5] 林强, 金春水, 向鹏, 等. 离轴照明Schwarzschild 投影物镜的计算机辅助装调方法[J]. 光学精密工程, 2003, 11(2): 144-150.

    Lin Qiang, Jin Chunshui, Xiang Peng, et al.. Computer-aided alignment of Schwarzschild objective with off-axis illumination [J]. Optics and Precision Engineering, 2003, 11(2): 144-150.

[6] Henry N Chapman, Donald W Sweeney. A rigorous method for compensation selection and alignment of micro lithographic optical systems[C]. SPIE, 1998, 3331: 102-103.

[7] Brent J Bos, Joseph M Howard, Philip J Young, et al.. Global alignment optimization strategies, procedures, and tools for the James Webb space telescope (JWST) integrated science instrument module (ISIM)[C]. SPIE, 2012, 8442, 84423I.

[8] 赵阳, 巩岩. 投影物镜小比率模型的计算机辅助装调[J]. 中国光学, 2012, 5(4): 394-400.

    Zhao Yang, Gong Yan. Computer aided alignment of small scale projected objective[J]. Chinese Optics, 2012, 5(4): 394-400.

[9] 孙敬伟, 陈涛, 王建立, 等. 主次镜系统的计算机辅助装调[J]. 光学精密工程, 2010, 18(10): 2156-2163.

    Sun Jingwei, Chen Tao, Wang Jianli, et al.. Computer-aided alignment for primary and secondary mirrors Opt[J]. Optics and Precision Engineering, 2010, 18(10): 2156-2163.

[10] Ke Liu, Li Yanqiu, Liu Jingfeng, et al.. Computer aided alignment of a 20 X Schwarzschild projection optics[C]. SPIE, 2008, 7130: 713042.

[11] 贾勇, 高云国, 邵帅. 热载荷下激光扩束系统的光机优化设计[J]. 中国激光, 2014, 41(1): 0116003

    Jia Yong, Gao Yunguo, Shao Shuai. Opto-mechanical optimization for laser expander system under thermal loads[J]. Chinese J Lasers, 2014, 41(1): 0116003.

[12] 窦震海, 王雅静, 申晋, 等. 动态光散射混合非负截断奇异值反演[J]. 中国激光, 2013, 40(6): 269-274.

    Dou Zhenhai, Wang Yajing, Shen Jin, et al.. A hybrid non-negative inversion of dynamic light scattering based on truncated singular value decomposition[J]. Chinese J Lasers, 2013, 40(6): 269-274.