人工晶体学报, 2020, 49 (7): 1162, 网络出版: 2020-08-18  

PVT法钨坩埚系统中自发生长自支撑AlN单晶及其表征分析

Growth and Characterization of Freestanding AlN by PVT Method under Tungsten Crucible System
作者单位
上海大学材料科学与工程学院,省部共建高品质特殊钢冶金与制备国家重点实验室,上海市钢铁冶金新技术开发应用重点实验室,上海 200444
引用该论文

龚建超, 朱如忠, 刘欢, 王琦琨, 李哲, 张刚, 吴亮. PVT法钨坩埚系统中自发生长自支撑AlN单晶及其表征分析[J]. 人工晶体学报, 2020, 49(7): 1162.

GONG Jianchao, ZHU Ruzhong, LIU Huan, WANG Qikun, LI Zhe, ZHANG Gang, WU Liang. Growth and Characterization of Freestanding AlN by PVT Method under Tungsten Crucible System[J]. Journal of Synthetic Crystals, 2020, 49(7): 1162.

参考文献

[1] Ambacher O. Growth and applications of group Ⅲ-nritrides[J]. Journal of Physics D: Applied Physics,1998,31(20): 2653-2710.

[2] Taniyasu Y, Kasu, Makimoto T. An aluminum nitride light-emitting diode with a wavelength of 210 nanometres[J]. Nature, 2006,441(7091): 325-328.

[3] Melo E G, Alayo M I. Photonic band gaps of wurtzite GaN and AlN photonic crystals at short wavelengths[J]. Photonics and Nanostructures-Fundamentals and Applications,2015,14: 35-45.

[4] 陶绪堂,王善朋,王 蕾,等.晶体材料研究--从体块晶体到微纳米晶体[J].人工晶体学报, 2019,48(5): 763-786.

[5] Lu H Q, Bhat I B, Lee B C, et al. MOCVD growth of GaN on bulk AlN substrates[J]. MRS Online Proceedings Library Archive,1997,482: 277-282.

[6] 陈航洋,刘达艺,林金钗,等.高Al组分Ⅲ族氮化物结构材料及其在深紫外LED应用的进展[J].物理学进展,2013,33(2): 43-56.

[7] Singh N B, Berghmans A, Zhang H, et al. Physical vapor transport growth of large AlN crystals[J]. Journal of Crystal Growth, 2003,250(1-2): 107-112.

[8] Bickermann M, Epelbaum B M, Filip O, et al. UV transparent single-crystalline bulk AlN substrates[J]. Physical Status Solidi,2011,7(1): 21-24.

[9] Hartmann C, Wollweber J, Seitz C, et al. Homoepitaxial seeding and growth of bulk AlN by sublimation[J]. Journal of Crystal Growth, 2008,310(5): 930-934.

[10] Hartmann C, Dittmar A, Wollweber J, et al. Bulk AlN growth by physical vapor transport[J]. Semiconductor Science and Technology, 2014,29(8): 1-10.

[11] Slack G A, McNelly T F. Growth of high purity AlN crystals[J]. Journal of Crystal Growth,1976,34(2): 263-279.

[12] Zhuang D, Herro Z G, Schlesser R, et al. Seeded growth of AlN single crystals by physical vapor transport[J]. Journal of Crystal Growth,2006,287(2): 372-375.

[13] Wang Z H, Wang Q K, He G D, et al. Characterization of freestanding AlN single crystals grown through a novel approach using the PVT method[J]. Rare Metal Materials and Engineering,2019,48(03): 403-408.

[14] Wang Q K, Huang J L, Wang Z H, et al. Anisotropic three-dimensional thermal stress modeling and simulation of homoepitaxial AlN single crystal growth by the physical vapor transport method[J]. Crystal Growth & Design,2018,18(5): 2998-3007.

[15] 刘理想,曹 凯,汪 佳,等.自发形核生长的AlN单晶湿法腐蚀研究[J].人工晶体学报, 2017,46(7): 48-52.

[16] Liu L H, Edgar J H. A global growth rate mode for aluminum nitride sublimation[J]. Journal of The Electrochemical Society,2002,149(1): 12-15.

[17] Yazdi G R, Vasiliauskas R, Syvajarvi M, et al. Fabrication of free-standing AlN crystals by controlled microrod growth[J]. Journal of Crystal Growth,2008,310(5): 935-939.

[18] Guguschev C, Dittmar A, Moukhina E, et al. Growth of bulk AlN single crystals with low oxygen content taking into account thermal and kinetic effects of oxygen-related gaseous species[J]. Journal of Crystal Growth,2012,360: 185-188.

[19] Bickermann M, Epelbaum B M, Winnacker A. Structural properties of AlN crystals grown by physical vapor transport[J]. Phycica Status Solidi(c), 2003,2(7): 2044-2048.

[20] Filip O, Epelbaum M, Bickermann M, et al. Effects of growth direction and polarity on bulk aluminum nitride crystal properties[J]. Journal of Crystal Growth, 2011,318(1): 427-431.

龚建超, 朱如忠, 刘欢, 王琦琨, 李哲, 张刚, 吴亮. PVT法钨坩埚系统中自发生长自支撑AlN单晶及其表征分析[J]. 人工晶体学报, 2020, 49(7): 1162. GONG Jianchao, ZHU Ruzhong, LIU Huan, WANG Qikun, LI Zhe, ZHANG Gang, WU Liang. Growth and Characterization of Freestanding AlN by PVT Method under Tungsten Crucible System[J]. Journal of Synthetic Crystals, 2020, 49(7): 1162.

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