光学 精密工程, 2018, 26 (6): 1450, 网络出版: 2018-10-02
MEMS中基底和薄膜的CMP制造技术
Fabrication of substrate and film in MEMS using CMP
补充材料
曾毅波, 张杰, 许马会, 郝锐, 沈杰男, 周辉, 郭航. MEMS中基底和薄膜的CMP制造技术[J]. 光学 精密工程, 2018, 26(6): 1450. ZENG Yi-bo, ZHANG Jie, XU Ma-hui, HAO Rui, SHEN Jie-nan, ZHOU hui, GUO Hang. Fabrication of substrate and film in MEMS using CMP[J]. Optics and Precision Engineering, 2018, 26(6): 1450.