利用准分子激光束辐照Y-Ba-Cu-O超导靶体,使之元素溅射出来,喷到平行于靶面的基片之上而淀积成膜,然后通过适当的退火过程,所制薄膜在液氮温区具有超导性。制取了零电阻温度85K的高温超导薄膜;讨论了淀积条件与退火过程对薄膜超导性能的影响。

An exeimer laser beam was used to irradiate superconducting Y-Ba Cu oxide pellet to make the elements of the target sputter and deposit as films on the substrates placed parallelly to the pellet. With appropriate post-annealing, the deposited films were of superconducting transition above 77 K, and the films with zero resistance temperature of 85 K were prepared. The effects of deposition conditions and post-annealing procedure on the properties of the thin film were discussed.