[1] BRUNING J H，HERRIOTT D R，GALLAGHER J E, et al. Digital wavefront measuring interferometer for testing optical surfaces and lenses ［J］. Applied Optics, 1974,13(11): 2693-2703.

[2] MALACARA D.Optical shop testing［M］.3rd ed.Hoboken:John Wiley&Sons,Inc.,2007:547-666.

[3] WINGERDEN J V,FRANKENA H J,SMORENBURG C. Linear approximation for measurement errors in phase shifting interferometry［J］.Applied Optics,1991,30(19):2718-2729.

[4] AI C, WYANT J C. Effect of piezoelectric transducer nonlinearity on phase shift interferometry［J］. Applied Optics, 1987,26(6): 1112 - 1116.

[5] HARIHRAN P,OREB B F,EIJU T.Digital phase-shifting interferometry:a simple error-compensating phase calculation algorithm［J］.Applied Optics,1987,26(13):2504-2506.

[6] CHENG Y Y, WYANT J C.Phase shifter calibration in phase-shifting interferometry［J］. Applied Optics, 1985,24(18): 3049-3052.

[7] HIBINO K,OREB B F,LARKIN K G, et al. Phase-shifting algorithms for nonlinear and spatially nonuniform phase shifts［J］. Journal of the Optical Society of America A,1997,14(4):918-930.

[8] GUTMANN B,WEBER H.Phase-shifter calibration and error detection in phase-shifting appllications:a new method［J］.Applied Optics,1998,37(32):7624-7631.

[9] OCHOA N A,HUNTLEY J M.Convenient method for calibrating nonlinear phase modulators for use in phase-shifting interferometry［J］.Optical Engineering,1998,37(9):2501-2505.

[10] LANGOJU R,PATIL A,RASTOGI P.Accurate nonlinear phase step estimation in phase shifting interferometry［J］.Optics Communications,2006,266:638-647.

[11] 罗秋凤，王海涛，崔向群，等.红外移相干涉仪中移相器的非线性校正［J］.仪器仪表学报，2001，22(增刊):53-54.

    LUO Qiu-feng，WANG Hai-tao，CUI Xiang-qun，et al. The nonlinear compensation for phase-shifter in infrared interferometer［J］.Chinese Journal of Scientific Instrument,2001,22(sup) :53-54.(in Chinese with an English abstract)

[12] 朱日宏，王青，陈磊，等.移相干涉技术中移相器的自校正方法［J］.光学学报，1998，18(7):932-937.

    ZHU Ri-hong,WANG Qing,CHEN Lei, et al.A self-correcting method of phase shifter in phase shifting interferometry［J］. Acta Optica Sinica, 1998，18(7) :932-937. (in Chinese with an English abstract)

[13] 朱日宏，陈磊，王青，等.移相干涉测量术及其应用［J］.应用光学，2006,27(2):85-88.

    ZHU Ri-hong, CHEN Lei,WANG Qing, et al.Phase-shift interferometry and its application［J］.Journal of Applied Optics,2006,27(2):85-88. (in Chinese with an English abstract)

[14] 苏志德，史振广，苏东奇，等.在随机和倾斜移相下光强归一化的迭代移相算法［J］.光学学报，2013，33(1)：0112001-1-7.

    SU Zhi-de，SHI Zhen-guang,SU Dong-qi,et al. Iterative phase shifting algorithm with normalized intensity in the presence of random and tilt phase shifts［J］.Acta Optica Sinica,2013,33,(1):0112001-1-7.(in Chinese with an English abstract)

[15] WANG Z Y,HAN B.Advanced iterative algorithm for phase extraction of randomly phase-shifted interferograms［J］.Optics Letters,2004,29(14):1671-1673.