均匀辐照365 nm LED光源设计及其在光刻中的应用
王向贤, 汪波, 傅强, 陈漪恺, 胡继刚, 张斗国, 明海. 均匀辐照365 nm LED光源设计及其在光刻中的应用[J]. 中国激光, 2012, 39(4): 0416001.
Wang Xiangxian, Wang Bo, Fu Qiang, Chen Yikai, Hu Jigang, Zhang Douguo, Ming Hai. Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography[J]. Chinese Journal of Lasers, 2012, 39(4): 0416001.
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王向贤, 汪波, 傅强, 陈漪恺, 胡继刚, 张斗国, 明海. 均匀辐照365 nm LED光源设计及其在光刻中的应用[J]. 中国激光, 2012, 39(4): 0416001. Wang Xiangxian, Wang Bo, Fu Qiang, Chen Yikai, Hu Jigang, Zhang Douguo, Ming Hai. Design of Uniform Illumination Optical Source with 365 nm LED and Application in Lithography[J]. Chinese Journal of Lasers, 2012, 39(4): 0416001.