Vanadium dioxide (VO₂) has promising applications in smart windows and active micro-optical devices due to its thermochromic properties. However, the successful fabrication and patterning of VO₂ thin films with the correct stoichiometry and phase are challenging. In this study, we investigated lithographically patterned and non-patterned VO₂ thin films fabricated by reactive ion beam deposition, using variable angle spectroscopic ellipsometry, Raman spectroscopy, and transmission and reflection measurements. The results show that the refractive index and extinction coefficient exhibit significant changes for near-infrared wavelengths when heated above 68 °C, confirming its thermochromic properties. The Raman spectroscopy results indicate the formation of the monoclinic phase VO₂(M) after annealing, which was not changed by reactive ion etching. Lithographically structured VO₂-layers were successfully realized demonstrating the potential of VO₂ as a material for active micro-optical devices, such as guided mode resonance filters with switchable reflectance. The results suggest that VO₂ has great potential as a promising material for actively switched optical elements and micro-optical devices.

为降低窄带宽超材料吸收器（Metamaterial Absorber，MA）制造成本的同时拓宽其应用领域，本文基于时域有限差分法利用介质材料设计出双波长窄带宽介质MA，其由Au衬底、SiO₂介质层和Si介质非对称光栅构成。经模拟计算发现，本文提出的双波长窄带宽介质MA在λ₁=1.20852 μm和λ₂=1.23821 μm具有超高吸收效率，而且FWHM也分别只有0.735 nm和0.077 nm。MA在λ₁实现窄带宽吸收主要是因为光在SiO₂层形成了法布里-珀罗(Fabry-Pérot, FP)腔共振，而MA在λ₂实现窄带宽吸收主要是由于入射光在介质非对称光栅中形成了导模共振效应。经理论计算可知，通过改变MA的结构参数可对其吸收特性产生较为显著的影响。

与传统化学颜料滤光片相比，基于微纳光学结构的滤光片所呈现的颜色不仅纯度高、亮度大而且不易褪色，更重要的是不会对环境产生污染。超构表面结构色滤光片因在光学装饰、彩色显示、成像以及光伏等领域存在潜在的应用价值而受到广泛关注。随着微纳加工技术的进步，基于不同共振机理的超构表面结构色滤光片相继实现。本文首先介绍了基于超构表面产生结构色的三种典型共振机理，然后介绍超构表面结构色滤光片在全彩显示、全息成像、信息加密以及彩色光伏器件等领域的应用现状，最后对超构表面结构色滤光片的发展前景进行展望。

鉴于导模共振滤波器具有高峰值反射率、低旁带反射、窄带以及带宽可控等优良特性，采用亚波长光栅的导模共振效应设计了一种平顶滤波器。通过将亚波长光栅与类法布里−珀罗腔结合使用，实现了窄带宽平顶滤波的效果。基于严格耦合波分析方法和等效介质理论，使用FDTD软件对光栅衍射效率进行了仿真分析。仿真结果表明，平顶滤波器在1130 nm处可获得2 nm宽的平顶，同时半高全宽达到6 nm，透射效率达到98%。通过微机电系统可以线性调节类法布里−珀罗腔的厚度，该器件可调谐的波长范围为1 130～1 300 nm，可应用于光通信、光开关等领域。