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 Influence of adsorption kinetics on stress evolution in magnetron-sputtered SiO2 and SiNx films

Jingping Li Ming Fang Hongbo He Jianda Shao Zhaoyang Li

[摘要]An in situ multi-beam optical sensor system was used to monitor and analyze the force per unit width (F/w) and stress evolution during several stages in magnetron-sputtered SiO2 and SiNx films. Stress...

 PDF全文高功率激光及等离子体物理研究论文集(专题) | 2013, 11(01):034305

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