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 Effects of etching conditions on surface morphology of periodic inverted trapezoidal patterned Si(100) substrate

ZHANG Lu YUAN Guo-dong WANG Qi WANG Ke-chao WU Rui-wei LIU Zhi-qiang LI Jin-min WANG Jun-xi

[摘要]

 PDF全文Optoelectronics Letters | 2018, 14(01):45

 Effects of etching conditions on surface morphology of periodic inverted trapezoidal patterned Si(100) substrate

ZHANG Lu YUAN Guo-dong WANG Qi WANG Ke-chao WU Ruiwei LIU Zhi-qiang LI Jin-min WANG Jun-xi

[摘要]In this paper, the anisotropic etching process of Si(100) wafers in tetramethyl ammonium hydroxide (TMAH) solution with isopropyl alcohol (IPA) is investigated in detail. An inverted trapezoidal patte...

 PDF全文Optoelectronics Letters | 2017, 13(01):45

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