随着光学元件口径的增大, 光学系统对精度的要求提高, 传统干涉仪检测手段已经不再满足要求。为了提高制造效率, 需要适当的在线检测技术和多工段检测手段。结合现阶段系统研制的需要, 介绍了子孔径拼接干涉检测技术、数字刀口检测技术以及红外干涉检测技术, 分别对其基本原理和具体应用进行了分析。

With the development of optical system, more and more optical components with large aperture are used. Strict and accurate testing on the optical elements is the guarantee of the efficient function of optical systems. With the increasing aperture of the optical components, the traditional test method can not satisfy the system's precision requirement. Furthermore, the on-line detection and the detection for different fabrication process are very important to improve the fabrication efficiency. According to the present research process of the optical system, the subaperture stitching interferometric detection technique, the digital knife-edge detection technique, and the infrared interferometric detection technique are introduced. And the basic principle and application examples of such methods are analyzed.