Frontiers of Optoelectronics, 2013, 6 (1): 114, 网络出版: 2013-04-15
Influence of process parameters on band gap of Al-doped ZnO film
Influence of process parameters on band gap of Al-doped ZnO film
Al-doped ZnO thin films band gap carrier concentration argon (Ar) flow rate sputtering power substrate temperature
摘要
Abstract
This paper presents the influence of process parameters, such as argon (Ar) flow rate, sputtering power and substrate temperature on the band gap of Al-doped ZnO film, Al-doped ZnO thin films were fabricated by radio frequency (RF) magnetron sputtering technology and deposited on polyimide and glass substrates. Under different Ar flow rates varied from 30 to 70 sccm, the band gap of thin films were changed from 3.56 to 3.67 eV. As sputtering power ranged from 125 to 200W, the band gap was varied from 3.28 to 3.82 eV; the band gap was between 3.41 and 3.88 eV as substrate temperature increases from 150°C to 300°C. Furthermore, the correlation between carrier concentration and band gap was investigated by HALL. These results demonstrate that the band gap of the Al-doped ZnO thin film can be adjusted by changing the Ar flow rate, sputtering power and substrate temperature, which can improve the performance of semiconductor devices related to Al-doped ZnO thin film.
Diqiu HUANG, Xiangbin ZENG, Yajuan ZHENG, Xiaojin WANG, Yanyan YANG. Influence of process parameters on band gap of Al-doped ZnO film[J]. Frontiers of Optoelectronics, 2013, 6(1): 114. Diqiu HUANG, Xiangbin ZENG, Yajuan ZHENG, Xiaojin WANG, Yanyan YANG. Influence of process parameters on band gap of Al-doped ZnO film[J]. Frontiers of Optoelectronics, 2013, 6(1): 114.