光学学报, 2013, 33 (7): 0712003, 网络出版: 2013-06-08
点衍射干涉仪系统误差标定
Calibration of the System Errors in Pinhole Diffracted Interferometer
测量 光学检测 点衍射干涉仪 双孔干涉 误差标定 measurement optical testing point diffraction interferometer two-hole interference error calibration
摘要
点衍射干涉仪是现代超高精度面形测量中常用干涉仪,其参考波由一定尺寸针孔衍射产生,因此摆脱了参考元件面形误差对测量精度的限制,使纳米及纳米级以下精度测量成为可能。点衍射干涉仪由于其结构特点,主要的系统误差来源于针孔衍射波与理想球面波的偏差。设计了一种新的点衍射干涉仪系统误差标定结构,降低了对准难度。同时提出了利用干涉图信息计算CCD位置,去除几何结构慧差的方法。搭建了基于双孔干涉的系统误差标定系统,在针孔直径为3 μm时,系统误差为0.009λ。
Abstract
The point diffraction interferometer is a common instrument used in modern ultra-precision surface testing. It can be used in the sub-nanometer measurement because its reference wave is produced by pinhole diffraction instead of optic surface, which dramatically limits the measurement accuracy. A new calibration system, which can reduce the alignment difficulty and a new method that takes advantage of the background intensity of the interferogram to locate the CCD senser have been proposed. The experimental result indicates that the system error is 0.009λ, when the pinhole has a diameter of 3 μm.
许嘉俊, 邢廷文, 徐富超. 点衍射干涉仪系统误差标定[J]. 光学学报, 2013, 33(7): 0712003. Xu Jiajun, Xing Tingwen, Xu Fuchao. Calibration of the System Errors in Pinhole Diffracted Interferometer[J]. Acta Optica Sinica, 2013, 33(7): 0712003.