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反射式偏振相移动态点衍射干涉技术的研究

Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry

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摘要

为了抑制环境振动引入的测量误差,实现对球面光学元件面形的动态检测,提出了一种基于微偏振片阵列的反射式针孔点衍射干涉系统。该干涉系统使用短相干激光光源获得两束相干光,通过调节两束偏振光的光强比调节干涉条纹的对比度,利用集成微偏振片阵列CCD相机采集的单帧图像获得4幅相移干涉图,实现动态检测。用该干涉系统和ZYGO干涉仪测量同一凹面镜样品,得到的面形结果相吻合,验证了该干涉系统测量结果的准确性。在实验测量平台上外加电动机产生振动条件,结果表明,当振动速度小于16 μm/s时,都可得到较准确的面形测量结果,表明该干涉系统的抗振性能较好。

Abstract

In order to suppress the measurement error caused by environmental vibration and realize the dynamic detection of spherical optical elements, a reflective point diffraction interference system based on micro polarizer array is proposed in this work. The interference system uses a short coherent laser source to obtain two coherent beams. The contrast of interference fringes is adjusted by adjusting the light intensity ratio of two polarized beams. Four phase-shifting interferograms are obtained by a single frame image collected by a CCD camera with integrated micro polarizer array to realize dynamic detection. The measurement results of the same concave mirror sample with the interference system and ZYGO interferometer are consistent, which verifies the accuracy of the measurement results of the interference system. On the experimental measurement platform, the vibration condition of the motor is added, and the results show that when the vibration velocity is less than 16 μm/s, more accurate surface shape measurement results can be obtained, which indicates that the anti-vibration performance of the interference system is good.

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中图分类号:TH741

DOI:10.3788/CJL202047.1004003

所属栏目:测量与计量

基金项目:国家自然科学基金;

收稿日期:2020-04-24

修改稿日期:2020-05-18

网络出版日期:2013-10-01

作者单位    点击查看

王晨:中国科学院上海光学精密机械研究所精密光学制造与检测中心, 上海 201800中国科学院大学材料科学与光电技术学院, 北京 100049
周游:中国科学院上海光学精密机械研究所精密光学制造与检测中心, 上海 201800
鲁棋:中国科学院上海光学精密机械研究所精密光学制造与检测中心, 上海 201800
徐天柱:中国科学院上海光学精密机械研究所精密光学制造与检测中心, 上海 201800
刘世杰:中国科学院上海光学精密机械研究所精密光学制造与检测中心, 上海 201800

联系人作者:刘世杰(shijieliu@siom.ac.cn)

备注:国家自然科学基金;

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引用该论文

Wang Chen,Zhou You,Lu Qi,Xu Tianzhu,Liu Shijie. Research on Reflective Polarization Phase-Shifting Dynamic Point Diffraction Interferometry[J]. Chinese Journal of Lasers, 2020, 47(10): 1004003

王晨,周游,鲁棋,徐天柱,刘世杰. 反射式偏振相移动态点衍射干涉技术的研究[J]. 中国激光, 2020, 47(10): 1004003

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