Chinese Optics Letters, 2016, 14 (5): 051401, Published Online: Aug. 6, 2018   

Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime Download: 828次

Author Affiliations
1 Laboratory for High Density Optical Storage of the Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
2 Key Laboratory of Functional Inorganic Material Chemistry (Heilongjiang University), Ministry of Education, Harbin 150080, China
3 University of Chinese Academy of Sciences, Beijing 100049, China
Abstract
Metal hydrazone complex thin films are used as laser patterning materials, and the patterns with a minimum resolution of about 78 nm are successfully obtained by the laser writing setup (λ=405 nm, NA=0.9). The minimum resolution is only about 1/8 of the writing spot size. In the formation of patterns, there is only a single step for forming patterns by the laser heating-induced clear thermal gasification threshold effect without any other development processes such as wet etching. This work provides an effective method for directly achieving nanoscale-resolved pattern structures with diode-based maskless laser writing lithography at visible light wavelengths.

Kui Zhang, Zhimin Chen, Yongyou Geng, Yang Wang, Yiqun Wu. Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime[J]. Chinese Optics Letters, 2016, 14(5): 051401.

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