Chinese Optics Letters, 2016, 14 (5): 051401, Published Online: Aug. 6, 2018
Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime Download: 828次
Abstract
Metal hydrazone complex thin films are used as laser patterning materials, and the patterns with a minimum resolution of about 78 nm are successfully obtained by the laser writing setup (λ = 405 nm , NA = 0.9 ). The minimum resolution is only about 1/8 of the writing spot size. In the formation of patterns, there is only a single step for forming patterns by the laser heating-induced clear thermal gasification threshold effect without any other development processes such as wet etching. This work provides an effective method for directly achieving nanoscale-resolved pattern structures with diode-based maskless laser writing lithography at visible light wavelengths.
Kui Zhang, Zhimin Chen, Yongyou Geng, Yang Wang, Yiqun Wu. Nanoscale-resolved patterning on metal hydrazone complex thin films using diode-based maskless laser writing in the visible light regime[J]. Chinese Optics Letters, 2016, 14(5): 051401.