针对传统微透镜阵列制作工艺复杂、成本高、周期长等缺点，研究了一种低成本、高效率制作微透镜阵列的技术方法。以SU-8负性光刻胶为主模结构材料，采用2次紫外斜曝光工艺，加工出主光轴平行于硅基的微透镜阵列作为主模结构。依次采用聚二甲基硅氧烷(PDMS)软光刻技术和NOA73紫外曝光技术对主模结构进行复制得到PDMS 和NOA73 2种材料的微透镜阵列，用共聚焦显微镜观察微透镜阵列的表面形貌并搭建光学检测平台，测试微透镜阵列的成像效果。结果显示，NOA73材料的微透镜阵列具有更好的光学性能。通过上述工艺加工的微透镜阵列具有较好的成像效果和表面形貌，重复性好且加工周期短，可集成在微流式细胞仪中用于样本流的荧光检测，提高了检测精度。

In order to solve shortcomings such as technology complexity, high cost and long cycle in the traditional microlens array, a new method to fabricate microlens array with low cost, high efficiency has been studied. The microlens array main mold structure is made with the main optical axis parallel to the silicon base , which uses SU-8 negative photoresist mold structure material as the material of main mold structure and two tilte-exposure technology. Polydimethylsiloxane (PDMS) soft lithography and NOA73 UV-exposure technology are taken to copy the main mold structure, and NOA73 microlens array and PDMS microlens array are made successively. The surface topography of the microlens array is observed by confocal microscope and an optical detection platform is built to test the imaging effect of the microlens array. The result shows that NOA73 microlens array has better optical characteristics. The microlens array has better imaging effect and surface topography with above technology process. It has advantages such as good repeatability, short processing cycle, and can be integrated in the micro-flow cytometry instrument to process fluorescence detection of the sample flow, which can enhance the detection precision.