Chinese Optics Letters, 2016, 14 (8): 081202, Published Online: Aug. 3, 2018  

Measurement of small wavelength shifts based on total internal reflection heterodyne interferometry Download: 608次

Author Affiliations
1 Institute of Applied Mechanics, National Taiwan University, Taipei 10617, China
2 Department of Mechatronics Engineering, National Changhua University of Education, Changhua 500, China
3 College of Mechanical Engineering, Guangxi University, Nanning 530004, China
Abstract
This Letter presents a method of an optical sensor for measuring wavelength shifts. The system consists of a diffraction grating and a total internal reflection heterodyne interferometer. As a heterodyne light beam strikes a grating, the first-order diffraction beam is generated. The light penetrates into a total internal reflection prism at an angle larger than the critical angle. A wavelength variation will affect the diffractive angle of the first-order beam, thus inducing a phase difference variation of the light beam emerging from the total internal reflections inside the trapezoid prism. Both the experimental and theoretical results reveal that, for the first-order diffractive beam, the sensitivity and resolution levels are superior to 5°/nm and 0.006 nm, respectively, in the range of wavelength from 632 to 634 nm, and are superior to 3.1°/nm and 0.0095 nm in the range from 632 to 637 nm. For the theoretical simulation of the fourth-order diffractive beam, they are superior to 6.4 deg/nm and 0.0047 nm in the range from 632 to 637 nm.

Meng-Chang Hsieh, Jiun-You Lin, Chia-Ou Chang. Measurement of small wavelength shifts based on total internal reflection heterodyne interferometry[J]. Chinese Optics Letters, 2016, 14(8): 081202.

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