Chinese Optics Letters, 2016, 14 (9): 093401, Published Online: Aug. 3, 2018
Full-field x ray nano-imaging system designed and constructed at SSRF Download: 864次
340.6720 Synchrotron radiation 340.7440 X-ray imaging 110.0110 Imaging systems 220.4830 Systems design
Abstract
Full-field x ray nano-imaging (FXNI) is one of the most powerful tools for in-situ, non-destructive observation of the inner structure of samples at the nanoscale. Owing to the high flux density of the third-generation synchrotron radiation facility, great progress is achieved for FXNI and its applications. Up to now, a spatial resolution of 20 nm for FXNI is achieved. Based on the user operation experiences over the years at the Shanghai Synchrotron Radiation Facility (SSRF) x ray imaging beamline, we know lots of user experiments will rely on a large range of spatial resolutions and fields of view (FOVs). In particular, x ray microscopes with a large FOV and a moderate spatial resolution of around 100 nm have a wide range of applications in many research fields. Driven by user requirements, a dedicated FXNI system is designed and constructed at the SSRF. This microscope is based on a beam shaper and a zone plate, with the optimized working energy range set to 8–10 keV. The experimental test results by a Siemens star pattern demonstrate that a spatial resolution of 100 nm is achieved, while an FOV of 50 μm is obtained.
Binggang Feng, Biao Deng, Yuqi Ren, Yudan Wang, Guohao Du, Hai Tan, Yanling Xue, Tiqiao Xiao. Full-field x ray nano-imaging system designed and constructed at SSRF[J]. Chinese Optics Letters, 2016, 14(9): 093401.