Chinese Optics Letters, 2016, 14 (10): 100501, Published Online: Aug. 2, 2018   

Low-cost method of fabricating large-aperture, high efficiency, Fresnel diffractive membrane optic using a modified moiré technique Download: 1095次

Author Affiliations
1 National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
2 Beijing Institute of Space Mechanics & Electricity, Beijing 100076, China
Abstract
To reduce the cost and achieve high diffraction efficiency, a modified moiré technique for fabricating a large-aperture multi-level Fresnel membrane optic by a novel design of alignment marks is proposed. The modified moiré fringes vary more sensitively with the actual misalignment. Hence, the alignment accuracy is significantly improved. Using the proposed method, a 20 μm thick, four-level Fresnel diffractive polyimide membrane optic with a 200 mm diameter is made, which exhibits over 62% diffraction efficiency into the +1 order, and an efficiency root mean square of 0.051.

Jian Zhang, Mengjuan Li, Ganghua Yin, Jianchao Jiao, Zhengkun Liu, Xiangdong Xu, Shaojun Fu. Low-cost method of fabricating large-aperture, high efficiency, Fresnel diffractive membrane optic using a modified moiré technique[J]. Chinese Optics Letters, 2016, 14(10): 100501.

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