Photonics Research, 2016, 4 (4): 04000153, Published Online: Sep. 29, 2016
Modeling and optimization of a single-drive push–pull silicon Mach–Zehnder modulator Download: 1846次
Optoelectronics Optoelectronics Electro-optical devices Electro-optical devices Modulators Modulators Integrated optoelectronic circuits Integrated optoelectronic circuits
Abstract
We present an equivalent circuit model for a silicon carrier-depletion single-drive push–pull Mach–Zehnder modulator (MZM) with its traveling wave electrode made of coplanar strip lines. In particular, the partialcapacitance technique and conformal mapping are used to derive the capacitance associated with each layer. The PN junction is accurately modeled with the fringe capacitances taken into consideration. The circuit model is validated by comparing the calculations with the simulation results. Using this model, we analyze the effect of several key parameters on the modulator performance to optimize the design. Experimental results of MZMs confirm the theoretical analysis. A 56 Gb/s on–off keying modulation and a 40 Gb/s binary phase-shift keying modulation are achieved using the optimized modulator.
Yanyang Zhou, Linjie Zhou, Haike Zhu, Chiyan Wong, Yida Wen, Lei Liu, Xinwan Li, Jianping Chen. Modeling and optimization of a single-drive push–pull silicon Mach–Zehnder modulator[J]. Photonics Research, 2016, 4(4): 04000153.