为了解决大口径大偏离量非球面高精度检测问题, 提出子孔径拼接与补偿器混合补偿检测模型。在被检测非球面镜面形精度未达到干涉仪测量动态范围要求, 同时轮廓测量精度不能满足后续加工要求时, 该模型可以实现对被检测镜的高分辨率检测, 为后续加工提供指导。为了验证模型的可行性, 结合工程实例, 对口径为1450 mm的离轴抛物面镜进行了混合补偿检测, 为了评价混合补偿检测精度, 将混合补偿检测结果与子孔径检测结果进行了对比分析, 其残差的峰谷值与均方根值分别为0.030λ与0.003λ, 验证了该模型的精度与可行性。

To accomplish the high-precision testing of aspherical mirror with large aperture and deviation, a hybrid compensation detection model combining subaperture stitching with compensator is proposed. The model can realize high resolution detection of the detected mirror and provide guidance for subsequent processing when the accuracy of the mirror is not high enough to be achieved by the dynamic range of the interferometer. At the same time, it′s beyond the testing accuracy of the profile measurement. To evaluate the validity of the proposed model, a 1450 mm off-axis parabolic mirror with the hybrid compensation method is tested. To evaluate the testing accuracy, the testing result with the subaperture testing result is compared. The peak and valley value and root mean square value of the residual between them is 0.030λ and 0.003λ respectively, verifying the accuracy and validity of the model.