激光与光电子学进展, 2016, 53 (12): 121403, 网络出版: 2016-12-14
准分子激光与SiC陶瓷的相互作用研究
Interaction Between Excimer Laser and SiC Ceramic
激光技术 辐照损伤 损伤机制 准分子激光 SiC陶瓷 laser technique irradiation damage damage mechanism excimer laser SiC ceramic
摘要
采用准分子激光对SiC陶瓷表面进行了不同脉冲数、不同单脉冲能量和不同重复频率的辐照实验, 获得了SiC陶瓷的辐照损伤二维和三维表面形貌, 并分析了微观作用机制。结果表明, 193 nm准分子激光辐照SiC陶瓷时既产生光热作用又产生光化学作用, 其中光热作用占主导; SiC表面损伤的宏观形貌与激光辐照参数相关, 辐照脉冲数增加或单脉冲能量增加均会加重辐照损伤, 增大激光重复频率会导致辐照损伤深度略微下降。
Abstract
Irradiation experiments are conducted on the SiC ceramic using excimer lasers with different pulse number, single-pulse energy, and repetition frequency. The two-dimensional and three-dimensional damage morphologies of irradiation-damaged SiC ceramic are acquired, and the microscopic damage mechanism is analyzed. The results indicate that, with 193 nm excimer laser irradiating on SiC ceramic, both the photo-thermal and photo-chemical effects are involved and the photo-thermal effect is dominant. The macroscopic damage morphology is closely related to laser irradiation parameters and the increment of either the irradiation pulse number or single-pulse energy aggravates the irradiation damage. Increasing the laser repetition frequency results in a little reduction of scratch depth.
罗艳. 准分子激光与SiC陶瓷的相互作用研究[J]. 激光与光电子学进展, 2016, 53(12): 121403. 罗艳. Interaction Between Excimer Laser and SiC Ceramic[J]. Laser & Optoelectronics Progress, 2016, 53(12): 121403.