介绍了EBCMOS探测器的工作原理、器件结构与发展历史。详细阐述了EBS增益机理, 实现了600倍的EBS增益, 并将EBCMOS与几种常见探测器特性进行了深入的对比研究。EBCMOS探测器将真空器件与半导体器件有机结合, 融合了真空光电探测器增益高、响应速度快、光谱灵活和半导体器件空间分辨率高、数字化输出、功耗低和成本低等优点。目前已在生物检测、微光夜视、激光雷达等诸多领域取得了广泛的应用。

The working principle, device structure and development history of EBCMOS detector were introduced. The mechanism of EBS gain was described in detail, and the EBS gain of 600 times, was achieved. The EBCMOS is compared with several common detectors. EBCMOS detector combines vacuum devices with semiconductor devices. It combines the advantages of high gain, fast response, flexible spectral response of vacuum devices, with the advantages of high spatial resolution, digital output, low power consumption and low cost of semiconductor devices. It has achieved a wide range of applications in biological detection, night vision, lidar and many other fields.