考察了利用皮秒激光烧蚀切割K9玻璃过程中后表面的烧蚀损伤现象, 比较了前、后表面的烧蚀特性, 分析了激光能量密度、扫描次数和扫描速度等因素对后表面损伤的影响。根据后表面烧蚀形貌和质量, 优化了激光单行单次扫描时的激光能量密度和扫描速度等参数。讨论了后表面烧蚀损伤的机理, 提出了抑制后表面损伤的方法。实验结果表明, 激光聚焦在前表面进行烧蚀切割时, 后表面会出现严重的烧蚀损伤, 且后表面烧蚀形貌和规律与前表面的显著不同。

The rear surface ablation damage phenomenon is investigated in the process of picosecond laser ablation cutting of K9 glass. The ablation qualities on the front and rear surfaces are compared, and the influences of laser fluence, scanning times and scanning speed, etc., on the rear surface damage are studied. Based on the ablation morphology and quality on the rear surface, the laser fluence, scanning speed, and other parameters at the cutting condition of single line and single pass are optimized. The ablation and damage mechanism of rear surfaces is discussed and the potential approach to suppress the rear surface damage is proposed. Experimental results show that, when the laser beam is focused on the front surface and the ablation cutting occurs, the rear surface is seriously ablated and damaged, and the morphology and ablation rule on rear surface are significantly different from those on front surface.