光学学报, 2017, 37 (1): 0112005, 网络出版: 2017-01-13   

干涉测量圆柱内表面的失调误差分析

Misalignment Analysis of Cylindrical Inner Surfaces in Interferometric Measurement
孙昊 1,2,*韩森 2,3唐寿鸿 2王芳 2,3殷留留 2,3
作者单位
1 长春理工大学光电工程学院, 吉林 长春 130022
2 苏州慧利仪器有限责任公司, 江苏 苏州 215123
3 上海理工大学光电信息与计算机工程学院, 上海 200093
摘要
通过菲佐型干涉系统、直角圆锥反射镜的一次性测量, 可获得圆柱形光学元件整周的面形信息。为实现高精度的面形测量, 实验装置的校准至关重要, 但由于调整机构的缺陷导致圆锥反射镜和被测圆柱的空间方位难以确定, 距离理想位置的任何位置偏差将给测量结果引入严重的测量误差。为去除该系统误差, 要明确各种失调误差的形成原因, 分析其对测量结果的影响。通过圆柱坐标系下数学模型的建立, 推导出偏移误差和旋转误差的变化公式, 并通过Matlab数值模拟和实际测量对其进行验证。结果表明, 利用误差计算公式可以推导出失调误差系数, 便于进一步的系统误差校正。
Abstract
Information of the entire cylindrical inner surfaces can be achieved by using a Fizeau interference system and a 90° conical mirror in a one-time measurement. In order to achieve high-precision surface measurement, the alignment of experimental apparatus is very crucial. However, defects of the alignment may cause the spatial orientation of the cone mirror and the tested cylinder difficult to determine, and any misplacement from ideal location may result in large measurement errors. Therefore, to remove the system errors, the reasons of all kinds of misalignment should be well understood and their influences on the measurement results should be analyzed. By establishing the mathematical model in cylindrical coordinate, the change formula of offset error and rotational error is deduced. The formula is verified by numerical simulation of Matlab software and practical measurement. The results show that the misalignment error coefficient can be successfully derived with the proposed formula, which will further benefit system error correction.

孙昊, 韩森, 唐寿鸿, 王芳, 殷留留. 干涉测量圆柱内表面的失调误差分析[J]. 光学学报, 2017, 37(1): 0112005. Sun Hao, Han Sen, Tang Shouhong, Wang Fang, Yin Liuliu. Misalignment Analysis of Cylindrical Inner Surfaces in Interferometric Measurement[J]. Acta Optica Sinica, 2017, 37(1): 0112005.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!