Photonics Research, 2017, 5 (1): 01000022, Published Online: Feb. 8, 2017
Image lithography in telluride suboxide thin film through controlling “virtual” bandgap Download: 752次
Abstract
In this work, TeO0.7 thin films were prepared by the reactive magnetron-controlling sputtering method. Complex gray-scale patterns were successfully fabricated on TeO0.7 thin films through the laser direct writing method. The structural origin of TeO0.7 thin film was investigated for gray-scale pattern formation. It is found that multiple gray-scale levels are dependent on the “virtual” bandgap energy of TeO0.7 thin films. The bandgap energy changes lead to refractive index and reflectivity difference. Thus, gray-scale tones can be formed. By accurately controlling laser energy, various “virtual” bandgaps can be generated in TeO0.7 thin films, and colorful gray-scale levels can be formed. Experimental results indicate that TeO0.7 thin film can be used as micro/nano image writing material.
Tao Wei, Jingsong Wei, Kui Zhang, Long Zhang. Image lithography in telluride suboxide thin film through controlling “virtual” bandgap[J]. Photonics Research, 2017, 5(1): 01000022.