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13.5 nm Schwarzschild microscope with high magnification and high resolution

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Abstract

A Schwarzschild microscope with a numerical aperture of 0.2 and a magnification of 130 in a 100 μm field of view (FOV) is designed and is working at 13.5 nm. Meanwhile, a CCD is used as a detector with a pixel size of 13 μm×13 μm and imaging area of 13 mm×13 mm. The imaging quality with tolerances of system and errors of mirrors are considered. We obtain that the best on-axes object resolution can be up to about 200 nm, the average value is 230 nm, and the resolution is about 360 nm at 80 μm FOV.

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DOI:10.3788/col201715.043401

所属栏目:X-ray optics

收稿日期:2016-11-02

录用日期:2017-01-24

网络出版日期:2017-02-20

作者单位    点击查看

Shenghao Chen:Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
Xin Wang:Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
Qiushi Huang:Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
Shuang Ma:Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China
and Zhanshan Wang:Key Laboratory of Advanced Micro-Structured Materials MOE, Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China

联系人作者:联系作者(wangzs@tongji.edu.cn)

备注:This work was supported by the National Natural Science Foundation of China (Nos. 11443007 and 11505129) and the National Key Scientific Instrument and Equipment Development Project (Nos. 2012YQ13012505 and 2012YQ24026402).

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引用该论文

Shenghao Chen, Xin Wang, Qiushi Huang, Shuang Ma, and Zhanshan Wang, "13.5 nm Schwarzschild microscope with high magnification and high resolution," Chinese Optics Letters 15(4), 043401 (2017)

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