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脉冲激光冲击效应对定域电沉积铜晶粒及其表面形貌的影响

Influence of Pulsed Laser Shock Effect on Grain and Its Surface Morphology of Locally Electrodeposited Copper

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摘要

为了研究脉冲激光冲击效应对定域电沉积铜晶粒及其表面形貌的影响, 搭建了脉冲激光电化学复合沉积实验系统, 并进行了理论分析和实验验证。对沉积过程中的冲击效应进行了检测, 采用扫描电子显微镜观察沉积体的表面形貌。结果表明, 利用脉冲激光与电沉积液的相互作用, 可细化定域电沉积晶粒。此外, 激光能量增大时, 沉积体晶粒细化, 宽度增大, 沉积体表面形貌更加平整, 内部气孔减少。

Abstract

In order to reveal the influence of the pulsed laser shock effect on grain and its surface morphology of locally electrodeposited copper, one pulsed laser electrochemical composite deposition system is constructed, and the corresponding theoretical analysis and experimental verification are also performed. The shock effect in the deposition process is tested and the surface morphology of deposited samples is observed by scanning electron microscope. The results show that the interaction of the pulsed laser with the electrodeposition solution can refine the grain in local electrodeposition. In addition, as the laser energy increases, the deposited samples have more refined grains, broader width, smoother surface morphology and fewer air holes.

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中图分类号:TN249

DOI:10.3788/cjl201744.0402013

所属栏目:激光制造

基金项目:国家自然科学基金(51275218, 51675242)、江苏省高校自然科学研究重大项目(16KJA460005)、江苏省六大人才高峰人才项目(GDZB-019)

收稿日期:2016-10-18

修改稿日期:2016-11-27

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聂昕:江苏大学机械工程学院激光技术研究所, 江苏 镇江 212013
张朝阳:江苏大学机械工程学院激光技术研究所, 江苏 镇江 212013
刘皋:江苏大学机械工程学院激光技术研究所, 江苏 镇江 212013
陆海强:江苏大学机械工程学院激光技术研究所, 江苏 镇江 212013
庄鸿武:江苏大学机械工程学院激光技术研究所, 江苏 镇江 212013
戴学仁:江苏大学机械工程学院激光技术研究所, 江苏 镇江 212013
焦健:江苏大学机械工程学院激光技术研究所, 江苏 镇江 212013

联系人作者:聂昕(303451809@qq.com)

备注:聂昕(1992-), 男, 硕士研究生, 主要从事激光电化学复合沉积技术方面的研究。

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引用该论文

Nie Xin,Zhang Zhaoyang,Liu Gao,Lu Haiqiang,Zhuang Hongwu,Dai Xueren,Jiao Jian. Influence of Pulsed Laser Shock Effect on Grain and Its Surface Morphology of Locally Electrodeposited Copper[J]. Chinese Journal of Lasers, 2017, 44(4): 0402013

聂昕,张朝阳,刘皋,陆海强,庄鸿武,戴学仁,焦健. 脉冲激光冲击效应对定域电沉积铜晶粒及其表面形貌的影响[J]. 中国激光, 2017, 44(4): 0402013

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