首页 > 论文 > 中国激光 > 44卷 > 4期(pp:402012--1)

飞秒激光成丝制备毫米级深孔

Fabrication of Millimeter-Scaled Holes by Femtosecond Laser Filamentation

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

利用飞秒激光成丝效应对2 mm厚的聚甲基丙烯酸甲酯材料在空气环境下进行打孔实验, 总结光丝长度随飞秒激光平均功率的变化, 利用扫描电子显微镜初步分析深微孔的表面形貌并测量孔径的大小, 然后分析孔径、深宽比以及锥度随激光平均功率和加工时间的变化规律。研究结果表明, 随着飞秒激光平均功率的增大, 孔径大小和锥度均有着明显的增大趋势, 且深宽比下降。随着加工时间的增加, 孔径变大, 深宽比下降, 锥度先增大后减小再增大, 但总体上呈现增大趋势。

Abstract

By using femtosecond laser filamentation, the drilling of micro-holes in 2 mm thick polymethyl methacrylate materials in the air environment is carried out. During the experiments, the variations of the femtosecond laser filament length with average femtosecond laser power are summarized. The surface morphology and the diameter of the micro-holes are measured by scanning electron microscopy. The hole dimensions, the aspect ratio (depth to diameter) and the taper as a function of laser average power and processing time are analyzed. The results show that with the increase of the average laser power, the diameter and the taper of the holes increase obviously, while the aspect ratio decreases. With the increase of the processing time, the diameter of the holes increases, the aspect ratio decreases, and the taper of the holes increases first and then decreases and then increases, however it keeps an increasing trend in overall.

投稿润色
补充资料

中图分类号:O436

DOI:10.3788/cjl201744.0402012

所属栏目:激光制造

基金项目:国家自然科学基金(51275012)、中国空间技术研究院创新基金项目

收稿日期:2016-11-03

修改稿日期:2017-01-16

网络出版日期:--

作者单位    点击查看

张艳杰:北京工业大学激光工程研究院强场与超快光子学实验室, 北京 100124
宋海英:北京工业大学激光工程研究院强场与超快光子学实验室, 北京 100124
刘海云:北京工业大学激光工程研究院强场与超快光子学实验室, 北京 100124
刘勋:中国空间技术研究院北京空间机电研究所, 北京 100094
李维:中国空间技术研究院北京空间机电研究所, 北京 100094
刘世炳:北京工业大学激光工程研究院强场与超快光子学实验室, 北京 100124

联系人作者:张艳杰(yjzhang92@163.com)

备注:张艳杰(1992-), 女, 硕士研究生, 主要从事超快激光微纳技术方面的研究。

【1】Xia Bo, Jiang Lan, Wang Sumei, et al. Femtosecond laser drilling of micro-holes[J]. Chinese J Lasers, 2013, 40(2): 0201001.
夏 博, 姜 澜, 王素梅, 等. 飞秒激光微孔加工[J]. 中国激光, 2013, 40(2): 0201001.

【2】Huang Haiyun. Study on minitaper laser drilling technique and technology[D]. Changchun: Changchun University of Science and Technology, 2004.
黄海云. 小锥度激光打孔技术及工艺研究[D]. 长春: 长春理工大学, 2004.

【3】Tan Xianfeng, Yang Junhua, Geng Yanqing. Experiment research on the influence of impulse width on laser drilling[J]. New Technology & New Process, 2011(3): 77-79.
谭险峰, 杨俊华, 耿艳青. 脉冲宽度对激光打孔影响的试验研究[J]. 新技术新工艺, 2011(3): 77-79.

【4】Zhong Minlin, Liu Wenjin. Leading areas and hot topics on global laser materials processing research[J]. Chinese J Lasers, 2008, 35(11): 1653-1659.
钟敏霖, 刘文今. 国际激光材料加工研究的主导领域与热点[J]. 中国激光, 2008, 35(11): 1653-1659.

【5】Yu Benhai. Ablation and micromachining of dielectrics with a femtosecond laser[D]. Wuhan: Huazhong University of Science & Technology, 2008.
余本海. 飞秒激光对透明电介质材料的烧蚀与微加工研究[D]. 武汉: 华中科技大学, 2008.

【6】He Fei, Cheng Ya. Femtosecond laser micromaching: Frontier in laser precision micromaching[J]. Chinese J Lasers, 2007, 34(5): 595-622.
何 飞, 程 亚. 飞秒激光微加工:激光精密加工领域的新前沿[J]. 中国激光, 2007, 34(5): 595-622.

【7】Shirk M D, Molian P A. A review of ultrashort pulsed laser ablation of materials[J]. Journal of Laser Applications, 1998, 10(1): 18-28.

【8】Wang Yuqian, Zhang Junzhan, Liu Yongsheng, et al. Effect of femtosecond laser parameters on TiC ceramic micro-hole drilling[J]. Chinese J Lasers, 2014, 41(10): 1003010.
王禹茜, 张军战, 刘永胜, 等. 飞秒激光工艺参数对加工TiC陶瓷微孔的影响[J]. 中国激光, 2014, 41(10): 1003010.

【9】Xing Songling, Liu Lei, Zou Guisheng, et al. Effects of femtosecond laser parameters on hole drilling of silica glass[J]. Chinese J Lasers, 2015, 42(4): 0403001.
邢松龄, 刘 磊, 邹贵生, 等. 飞秒激光参数对石英玻璃微孔加工的影响[J]. 中国激光, 2015, 42(4): 0403001.

【10】Hu Mengning, Ge Licheng, Zhang Jinping, et al. Hole-drilling with high depth-diameter ratio using multi-pulse femtosecond laser[J]. Chinese J Lasers, 2016, 43(4): 0403006.
胡梦宁, 葛励成, 张晋平, 等. 多脉冲飞秒激光深小孔的加工[J]. 中国激光, 2016, 43(4): 0403006.

【11】Liao Changrui. Theoretical and experimental studies on femtosecond laser micromaching of metals[D]. Wuhan: Huazhong University of Science & Technology, 2007.
廖常锐. 飞秒激光微细加工金属材料的理论与实验研究[D]. 武汉: 华中科技大学, 2007.

【12】Tan Chao. Research on processing technology and surface quality of metal micro-holes machined by femtosecond laser[D]. Changsha: Central South University, 2014.
谭 超. 飞秒激光加工金属微孔工艺及表面质量研究[D]. 长沙: 中南大学, 2014.

【13】Pan Yong, Jiang Zhaohua, Zhang Tongxing, et al. Application of rotating pairs of optical wedge in the laser micro-holes processing[J]. Applied Laser, 2009, 29(6): 515-517.
潘 涌, 姜兆华, 张同兴, 等. 旋转双光楔在激光微孔加工中的应用[J]. 应用激光, 2009, 29(6): 515-517.

【14】Rairoux P, Schillinger H, Niedermeier S, et al. Remote sensing of the atmosphere using ultrashort laser pulses[J]. Appl Phys B, 2000, 71(4): 573-580.

【15】Zhang Ping, Bian Baomin, Qian Yan, et al. The study of filament caused by propagation of ultra-strong femtosecond laser in air[J]. Laser Journal, 2004, 25(6): 1-3.
张 平, 卞保民, 钱 彦, 等. 飞秒超强激光在空气中光丝现象的研究[J]. 激光杂志, 2004, 25(6): 1-3.

【16】Dai Yuyin. Investigation of propagation of femtosecond laser pulses in air[D]. Changchun: Jilin University, 2014.
代玉银. 飞秒激光在空气中的传输研究[D]. 长春: 吉林大学, 2014.

【17】Zhang Jie, Hao Zuoqiang, Yuan Xiaohui, et al. Propagation of intense femtosecond laser pulses in air[J]. Chinese Journal of Quantum Electronics, 2006, 23(3): 282-294.
张 杰, 郝作强, 远晓辉, 等. 超强飞秒激光脉冲在空气中的传输研究[J]. 量子电子学报, 2006, 23(3): 282-294.

【18】Xu shengqi. Study of intensity clamping during femtosecond laser filamentation[D]. Tianjin: Nankai University, 2012.
徐圣奇. 飞秒激光成丝现象中光强钳制效应研究[D]. 天津: 南开大学, 2012.

【19】Sun Xiaodong. Control of multiple filaments during femtosecond laser filamentation[D]. Tianjin: Nankai University, 2012.
孙晓东. 飞秒激光成丝现象中多丝控制的研究[D]. 天津: 南开大学, 2012.

【20】Zhou Chunyan, Jiang Yuewei, Xu Bing. Manufacture and market of PMMA[J]. China Plastics Industry, 2011, 39(9): 5-15.
周春艳, 姜月伟, 徐 兵. 国内聚甲基丙烯酸甲酯(PMMA)的生产及市场[J]. 塑料工业, 2011, 39(9): 5-15.

【21】Durnin J, Miceli J J, Eberly J H. Diffraction-free beams[J]. Physical Review Letters, 1987, 58(15): 1499-1501.

【22】Huang Wenlong, Lü Baida, Ye Yidong, et al. Axial intensity distribution of a Bessel-Gauss beam focused by an aperture lens[J]. Chinese J Lasers, 1995, 22(4): 285-292.
黄文龙, 吕百达, 叶一东, 等. 有限束宽聚焦贝塞尔-高斯光束轴上的光强分布[J]. 中国激光, 1995, 22(4): 285-292.

【23】Jiang Zhiping, Lu Qisheng. Bessel beam and laser drilling[J]. Optical Technology, 1996(1): 32-35.
蒋志平, 陆启生. 贝塞尔光束与激光打孔[J]. 光学技术, 1996(1): 32-35.

【24】Mori S. Side lobe suppression of a Bessel beam for high aspect ratio laser processing[J]. Precision Engineering, 2014, 39: 79-85.

【25】Jiang Zhiping, Lu Qisheng, Liu Jinze, et al. Applications of Bessel beam a review[J]. Optical Technology, 1997(1): 1-9.
蒋志平, 陆启生, 刘金泽, 等. 贝塞尔光束的应用[J]. 光学技术, 1997(1): 1-9.

【26】Xu Zhijun. Experimental and applied study of femtosecond laser-induced[D]. Tianjin: Nankai University, 2013.
徐智军. 飞秒激光诱导空气等离子体的实验与应用研究[D]. 天津: 南开大学, 2013.

【27】Xu Z J, Liu W, Zhang N, et al. Effect of intensity clamping on laser ablation by intense femtosecond laser pulses[J]. Optics Express, 2008, 16(6): 3604-3609.

【28】Dasa D K, Pollock T M. Femtosecond laser machining of cooling holes in thermal barrier coated CMSX4 superalloy[J]. Journal of Materials Processing Technology, 2009, 209(15): 5661-5668.

引用该论文

Zhang Yanjie,Song Haiying,Liu Haiyun,Liu Xun,Li Wei,Liu Shibing. Fabrication of Millimeter-Scaled Holes by Femtosecond Laser Filamentation[J]. Chinese Journal of Lasers, 2017, 44(4): 0402012

张艳杰,宋海英,刘海云,刘勋,李维,刘世炳. 飞秒激光成丝制备毫米级深孔[J]. 中国激光, 2017, 44(4): 0402012

被引情况

【1】李苏宇,费德厚,金明星吉林大学原子与分子物理研究所, 吉林省应用原子分子光谱重点实验室, 吉林 长春 130012. 飞秒激光脉冲在部分激发气体中的传播. 中国激光, 2017, 44(9): 902002--1

【2】上官赢,刘 朋,张军军,白克强,段 军. 多焦点激光分离厚透明材料. 中国激光, 2017, 44(11): 1102008--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF