首页 > 论文 > 中国激光 > 44卷 > 4期(pp:402003--1)

激光诱导背向湿式刻蚀蓝宝石过程中声发射信号检测试验

Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

利用声发射仪对脉冲光纤激光诱导背向湿式刻蚀蓝宝石的过程进行了试验研究。在激光诱导背向湿式刻蚀蓝宝石的过程中检测到的声发射信号包含丰富的特征信息; 利用声发射信号的幅度、能量计数和撞击计数等特征参数对激光诱导背向湿式刻蚀蓝宝石过程进行表征; 蓝宝石未被切穿时声发射信号表现为声发射事件少, 幅度大(90~100 dB), 能量计数较大, 撞击计数较小; 蓝宝石被切穿后声发射信号表现为声发射事件多, 幅度小(40~80 dB), 能量计数基本为0, 撞击计数较大。

Abstract

An experimental study on the process of backside wet etching sapphire induced by pulse fiber laser is carried out by acoustic emission detector. In the backside wet etching sapphire process induced by laser, the detected acoustic emission signal contains a lot of characteristic information. The backside wet etching sapphire process can be characterized by parameters such as amplitude, marse and hit-counting of acoustic emission signal. Before the sapphire is cut through, the acoustic emission signal shows few acoustic emission events, large amplitude of 90-100 dB, large marse and small hit-counting. After the sapphire is cut through, the acoustic emission signal shows many acoustic emission events, small amplitude of 40-80 dB. Meanwhile, the marse becomes nearly zero, and the hit-counting is large.

投稿润色
补充资料

中图分类号:TN249;O426

DOI:10.3788/cjl201744.0402003

所属栏目:激光制造

基金项目:国家自然科学基金(51575114)、广东省普通高校特色创新项目(2014KTSCX059)、广州市科技计划(201607010156)、 广东省自然科学基金(S2013010014070)

收稿日期:2016-11-16

修改稿日期:2016-12-19

网络出版日期:--

作者单位    点击查看

罗志良:广东工业大学机电工程学院, 广东 广州 510006
谢小柱:广东工业大学机电工程学院, 广东 广州 510006
魏昕:广东工业大学机电工程学院, 广东 广州 510006
胡伟:广东工业大学机电工程学院, 广东 广州 510006
任庆磊:广东工业大学机电工程学院, 广东 广州 510006
江伟:广东工业大学机电工程学院, 广东 广州 510006

联系人作者:罗志良(1157740692@qq.com)

备注:罗志良(1991-), 男, 硕士研究生, 主要从事激光精密加工过程检测技术方面的研究。

【1】Zimmer K, Bhme R, Ehrhardt M, et al. Mechanism of backside etching of transparent materials with nanosecond UV-lasers[J]. Applied Physics A, 2010, 101(2): 405-410.

【2】Ehrhardt M, Raciukaitis G, Gecys P, et al. Laser-induced backside wet etching of fluoride and sapphire using picosecond laser pulses[J]. Applied Physics A, 2010, 101(2): 399-404.

【3】Xie Xiaozhu, Huang Xiandong, Chen Weifang, et al. Study on scribing of sapphire substrate by pulsed green laser irration[J]. Chinese J Lasers, 2013, 40(12): 1203010.
谢小柱, 黄显东, 陈蔚芳, 等. 脉冲绿激光划切蓝宝石过程研究[J]. 中国激光, 2013, 40(12): 1203010.

【4】Cai Zhixiang, Gao Xunyin, Yang Wei, et al. Study on fiber laser cutting of sapphire substrate[J]. Laser & Optoelectronics Progress, 2015, 52(8): 081403.
蔡志祥, 高勋银, 杨 伟, 等. 光纤激光切割蓝宝石基片的工艺研究[J]. 激光与光电子学进展, 2015, 52(8): 081403.

【5】Zimmer K, Ehrhardt M, Bhme R. Simulation of laser-induced backside wet etching of fused silica with hydrocarbon liquids[J]. Journal of Applied Physics, 2010, 107(3): 034908.

【6】Ehrhardt M, Raciukaitis G, Gecys P, et al. Laser-induced backside wet etching of fluoride and sapphire using picosecond laser pulses[J]. Applied Physics A, 2010, 101(2): 399-404.

【7】Ehrhardt M, Raciukaitis G, Gecys P, et al. Microstructuring of fused silica by laser-induced backside wet etching using picosecond laser pulses[J]. Applied Surface Science, 2010, 256(23): 7222-7227.

【8】Dolgaev S I, Lyalin A A, Simakin A V, et al. Fast etching and metallization of via-holes in sapphire with the help of radiation by a copper vapor laser[J]. Applied Surface Science, 1997, 109-110: 201-205.

【9】Mao Huaidong, Zhang Dawei. On-line study of cracks during laser cladding[J]. Applied Laser, 2007, 27(3): 186-191.
毛怀东, 张大卫. 激光熔覆过程中裂纹在线研究[J]. 应用激光, 2007, 27(3): 186-191.

【10】Wang F, Mao H, Zhang D, et al. Online study of cracks during laser cladding process based on acoustic emission technique and finite element analysis[J]. Applied Surface Science, 2008, 255(5): 3267-3275.

【11】Luo H, Zeng H, Hu L, et al. Application of artificial neural network in laser welding defect diagnosis[J]. Journal of Materials Processing Technology, 2005, 170(1-2): 403-411.

【12】Huang W, Kovacevic R. A neural network and multiple regression method for the characterization of the depth of weld penetration in laser welding based on acoustic signatures[J]. Journal of Intelligent Manufacturing, 2011, 22(2): 131-143.

【13】Liu Jinglei, Chen Yanbing, Xu Qinghong. Correlation of acoustic signals and weld depth laser welding[J]. Transaction of the China Welding Institution, 2006, 27(1): 72-75.
刘京雷, 陈彦宾, 徐庆鸿. 激光焊接声信号与熔深的相关性[J]. 焊接学报, 2006, 27(1): 72-75.

【14】Kurita T, Ono T, Morita N. Study on the relationship between laser processing sound and material removal characteristics[J]. Journal of Materials Processing Technology, 2000, 97(1-3): 168-173.

【15】Kurita T, Ono T, Nakai T. A study of processed area monitoring using the strength of YAG laser processing sound[J]. Journal of Materials Processing Technology, 2001, 112(1): 37-42.

【16】Kek T, Grum J. Monitoring laser cut quality using acoustic emission[J]. International Journal of Machine Tools and Manufacture, 2009, 49(1): 8-12.

【17】Grum J, Kek T. Assessment of laser-cut quality on the basis of acoustic emission signals captured with a PZT sensor[J]. Materials Science Forum, 2008, 589: 215-220.

【18】Jiang Wei, Xie Xiaozhu, Wei Xin, et al. Pulse fiber laser controlled fracture cutting of ultrathin strontium titanate ceramic substrate[J]. Chinese J Lasers, 2016, 43(5): 0503081.
江 伟, 谢小柱, 魏 昕, 等. 脉冲光纤激光控制断裂切割超薄钛酸锶陶瓷基片[J]. 中国激光, 2016, 43(5): 0503081.

【19】Huang Xiandong. Numerical simulation and experimental investigation in laser-induced backside wet etching of sapphire[D]. Guangzhou: Guangdong University of Techology, 2015.
黄显东. 激光背向湿式刻蚀蓝宝石过程的数值模拟与实验研究[D]. 广州: 广东工业大学, 2015.

【20】Hu Manfeng. Study on laser induced cavitation bubbles and flow field distribution during laser-induced backside wet etching sapphire substrates[D]. Guangzhou: Guangdong University of Techology, 2014.
胡满凤. 激光背向湿式蚀刻加工蓝宝石过程中光诱导气泡和微射流流场分布研究[D]. 广州: 广东工业大学, 2014.

【21】Chang Zhisheng. Damage research of toughening ceramic based on acoustic emission technology[D]. Beijing: Beijing Institute of Technology, 2016.
常智胜. 基于声发射技术的增韧陶瓷损伤研究[D]. 北京: 北京理工大学, 2016.

【22】Chen Qingming, Cheng Zuhai. Research of laser acoustic effect in liquid[J]. Laser & Infrared, 2006, 36(8): 623-626.
陈清明, 程祖海. 激光在液体中的声效应研究[J]. 激光与红外, 2006, 36(8): 623-626.

引用该论文

Luo Zhiliang,Xie Xiaozhu,Wei Xin,Hu Wei,Ren Qinglei,Jiang Wei. Experimental Study on Acoustic Emission Signal Detection in Process of Laser-Induced Backside Wet Etching of Sapphire[J]. Chinese Journal of Lasers, 2017, 44(4): 0402003

罗志良,谢小柱,魏昕,胡伟,任庆磊,江伟. 激光诱导背向湿式刻蚀蓝宝石过程中声发射信号检测试验[J]. 中国激光, 2017, 44(4): 0402003

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF