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基于微流控技术的高效液相脉冲激光烧蚀法

Efficient Pulsed Laser Ablation in Liquid Based on Microfluidic Technology

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摘要

液相脉冲激光烧蚀法(PLAL)具有绿色环保、适用范围广及可制备复合材料等优点, 受到学术界的广泛关注, 但是较低的制备效率限制了它进一步发展。将微流控技术与液相脉冲激光烧蚀法相结合, 在硅基微流控芯片中实现了快速高效制备晶格型(400~800 nm)和球型(100~300 nm)硅纳米结构。通过扫描电子显微镜和光谱仪对其形貌结构及分布情况进行了测试表征, 获得了微流控流速、激光烧蚀功率与纳米粒子制备效率之间的关系。该方法将液相脉冲激光烧蚀法的最高制备效率提高了30%以上, 达到87.5 mg/min, 为将来液相脉冲激光烧蚀法工业化生产提供一种新的技术路线。

Abstract

Pulsed laser ablation in liquid (PLAL) has attracted significant interest in the academic community for its remarkable characteristics of environment protection, wide application range and capable for composite material preparation. But the relative lower preparation rate of PLAL prevents it from further development. Silicon nanostructures with lattice (400~800 nm) and spherical (100~300 nm) patterns on microfluidic chip with promoted production rate is achieved by combining microfluidic technology and PLAL. The morphology structure and distribution are characterized by scanning electron microscope and spectrometer. The relationships between preparation rate of nanoparticles and microfluidic flow velocity as well as laser ablation power are obtained. The maximum preparation rate of PLAL enhances by 30%, up to 87.5 mg/min by the proposed method. Which provides a new technique route of PLAL industrial production.

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中图分类号:O439

DOI:10.3788/cjl201744.0402006

所属栏目:激光制造

基金项目:国家自然科学基金(91423102, 91323301, 61605055, 21473076)

收稿日期:2016-11-13

修改稿日期:2016-12-18

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关凯珉:吉林大学集成光电子学国家重点联合实验室吉林大学实验区, 吉林 长春 130012
刘晋桥:西安交通大学机械工程学院, 陕西 西安 710049
徐颖:吉林大学集成光电子学国家重点联合实验室吉林大学实验区, 吉林 长春 130012
于颜豪:吉林大学集成光电子学国家重点联合实验室吉林大学实验区, 吉林 长春 130012

联系人作者:关凯珉(Guankm@163.com)

备注:关凯珉(1991-), 男, 硕士研究生, 主要从事飞秒激光加工方面的研究。

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引用该论文

Guan Kaimin,Liu Jinqiao,Xu Ying,Yu Yanhao. Efficient Pulsed Laser Ablation in Liquid Based on Microfluidic Technology[J]. Chinese Journal of Lasers, 2017, 44(4): 0402006

关凯珉,刘晋桥,徐颖,于颜豪. 基于微流控技术的高效液相脉冲激光烧蚀法[J]. 中国激光, 2017, 44(4): 0402006

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