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基于飞秒激光时空聚焦技术的三维微纳加工

Three-Dimensional Micro- and Nano-Machining Based on Spatiotemporal Focusing Technique of Femtosecond Laser

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摘要

介绍飞秒激光时空聚焦技术的基本原理,回顾了该技术在改善飞秒激光加工的分辨率、抑制加工过程中的非线性效应以及提高材料加工质量等方面的应用。重点讨论了脉冲前沿倾斜(PFT)、光强平面倾斜等时空聚焦飞秒激光脉冲的独特光场特性及其对材料加工产生的影响。介绍了时空聚焦技术在强场物理领域中的应用,并对该技术的适用范围进行了讨论。最后对该技术的特点和应用进行总结,并指明了未来的研究方向。

Abstract

The fundamental principle of spatiotemporal focusing technique of femtosecond laser is introduced in this paper, and applications of this technique on improving the resolution of femtosecond laser fabrication, suppressing the nonlinear effect of the fabricating process, and improving the materials fabrication quality are reviewed. Discussion is emphasized on the unique optical field characteristics of spatiotemporally focused femtosecond laser pulses including pulse front tilt (PFT) and intensity plane tilt, and their influence on material processing. Moreover, the applications of spatiotemporal focusing technique on high field physics and its scope of applications are introduced. Lastly, we summarize the principles and applications of spatiotemporal focusing technique, and suggest several directions for the future research.

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中图分类号:TN249

DOI:10.3788/lop54.040005

所属栏目:综述

基金项目:国家自然科学基金(11304330)、河南省高等学校重点科研项目(17A140023)、洛阳师范学院国家级培育基金(2015-PYJJ-001)

收稿日期:2016-08-17

修改稿日期:2016-11-21

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作者单位    点击查看

井晨睿:洛阳师范学院物理与电子信息学院, 河南 洛阳 471000中国科学院上海光学精密机械研究所强场激光物理国家重点实验室, 上海 201800
王朝晖:中国科学院上海光学精密机械研究所强场激光物理国家重点实验室, 上海 201800中国航空工业集团公司洛阳电光设备研究所, 河南 洛阳 471000
程亚:中国科学院上海光学精密机械研究所强场激光物理国家重点实验室, 上海 201800

联系人作者:井晨睿(jing1989111@sina.com)

备注:井晨睿(1989-),女,博士,讲师,主要从事飞秒激光成丝方面的研究。

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引用该论文

Jing Chenrui,Wang Zhaohui,Cheng Ya. Three-Dimensional Micro- and Nano-Machining Based on Spatiotemporal Focusing Technique of Femtosecond Laser[J]. Laser & Optoelectronics Progress, 2017, 54(4): 040005

井晨睿,王朝晖,程亚. 基于飞秒激光时空聚焦技术的三维微纳加工[J]. 激光与光电子学进展, 2017, 54(4): 040005

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