Chinese Optics Letters, 2017, 15 (7): 071402, Published Online: Jul. 20, 2018
Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp Download: 908次
Abstract
Accurate and precise wavelength controlling of narrowband excimer lasers is essential for the lithography of an integrated circuit. High-precision wavelength tuning and calibration of a line-narrowed ArF laser are presented in this work. The laser spectrum is narrowed to a sub-picometer with a line narrowing system. Absolute wavelength calibration of the line-narrowed laser is performed based on the optogalvanic (OG) effect using iron hollow cathode discharge (HCD). An sccuracy of better than 0.1 pm for wavelength tuning and calibration is achieved with our homemade wavemeter.
Zhijun Yuan, Haibo Zhang, Ren Ye, Jun Zhou, Yunrong Wei, Qihong Lou. Wavelength calibration of narrowband ArF laser with iron hollow cathode lamp[J]. Chinese Optics Letters, 2017, 15(7): 071402.