SOI纳米光波导表面粗糙度会显著增加波导散射损耗, 降低表面粗糙度是其在许多方面应用中亟待解决的关键问题之一。首先介绍了表面粗糙度概念, 总结了表面散射损耗理论方面的研究进展。随后回顾了多种SOI纳米光波导表面粗糙度测量方法, 以及在表面形貌表征中存在的问题。此外, 还对几种波导表面光滑工艺进行介绍, 并结合具体的工作对光波导表面粗糙度各方面研究进展进行了总结。

Surface roughness of silicon-on-insulator(SOI) nano-optical waveguide can significantly increase scattering loss. It is one of the problems to be solved urgently in different application fields. Firstly, the concept of surface roughness and the progress of theoretical research of surface scattering loss were introduced. Secondly, various advanced measurement methods of surface roughness of SOI nano-optical waveguide, including the problems existing in the characterization of surface topography, were reviewed. Thirdly, several kinds of surface smoothing processes were also introduced. Finally, some conclusions were presented combined with our study.