With the development of laser manufacturing technology, people can fabricate VLS plane gratings by holographic li-thography. Compared with traditional gratings, the light incident on different positions of the VLS grating can diffract light with different angles, which leads to astigmatism and focusing effect. The application of VLS plane gratings reduc-es the number of optical elements inside the instrument and improves the resolution of the instrument. It is widely used in vacuum ultraviolet, soft X ray, optical fiber communication, sensor and many other fields.