红外单光子探测因其超高的检测灵敏度和信噪比, 有效提升了弱光检测系统的性能水平。基于TSMC 0.35 μm CMOS工艺, 提出了一种阵列型数字式红外读出电路及其应用系统的设计方法。采用由OSC多相时钟构成的低段全局共享TDC和高段像素独享TDC的两段式阵列结构, 在170 MHz时钟频率下, 实测获得了小于1 ns的时间分辨率和3 μs的量程, 并在1 kHz的帧率下采用串行模式输出数据, 经相关数据处理, 最终实现测距轮廓成像的功能。

A infrared single-photon detecting system has greatly improved the performance of the weak light detection system due to its ultra high sensitivity and SNR. Based on TSMC 0.35 μm CMOS process, a design method for digital mode infrared ROIC and its application system were proposed. The system included high-segment pixel TDC and low-segment global shared TDC controlled by OSC multiphase clocks. The implemented circuit was operated at frame rates of 1 kHz with data output in a series mode, also it has a time resolution of less than 1ns along with a 3 μs measurement range under 170 MHz reference frequency condition, which can finally satisfy the application of ranging and imaging after relevant data processing.