光电技术应用, 2017, 32 (4): 8, 网络出版: 2017-10-30
几种光学超分辨技术研究
Research on Optical Super-resolution Technology
超分辨 显微镜 投影光刻系统 分辨率 super-resolution microscopy projection lithography system optical instrument resolution
摘要
随着人们对光学仪器分辨率的不懈追求, 出现了超分辨这一概念。文中主要研究介绍了显微镜和投影光刻系统中的几种光学超分辨技术, 并比较了两类系统超分辨技术的不同和联系, 对光学超分辨技术进行总结。
Abstract
With the continuous pursuit of optical instrument resolution, the concept of super-resolution is presented. Several kinds of super-resolution technologies in the optical microscopy and projection lithography system are mainly researched and introduced. And the difference and relation of the super-resolution technology between the two super-resolution projection lithography systems are compared. And the optical super-resolution technology is summarized.
牛亚军, 查为懿, 常军, 沈本兰, 杨海波, 闫秀生, 田宏. 几种光学超分辨技术研究[J]. 光电技术应用, 2017, 32(4): 8. NIU Ya-jun, ZHA Wei-yi, CHANG Jun, SHEN Ben-lan, YANG Hai-bo, YAN Xiu-sheng, TIAN Hong. Research on Optical Super-resolution Technology[J]. Electro-Optic Technology Application, 2017, 32(4): 8.