纳米级金属薄膜能够作为热释电探测器红外吸收薄膜在14~16 μm波段范围内有效应用已经得到证明.通过调节沉积在LT(钽酸锂)晶体材料上的纳米级镍铬(NiCr)薄膜的厚度和表面特征来改善纳米金属薄膜红外吸收特性.通过调节晶体材料的厚度, 改变抗反射腔的深度, 从而调节吸收波长.为进一步加强红外吸收, 应用化学腐蚀, 生成粗糙的纳米级薄膜表面结构, 从而极大程度上增加吸收表面积.通过将这两种方法结合, 可以明显增强指定波段的红外吸收, 且其制造过程完全兼容, 易于实现.可控的吸收性能的实验结果与仿真和设计情况相符合.

Nano-scale metallic films have been proven to be effective infrared absorption layers for pyroelectric detectors operated at 14~16 μm spectral range for space applications. The infrared absorption improvement can be achieved by adjusting the thickness and surface characteristics of the nano-scale Nickel-chromium (NiCr) film deposited on the LT (lithium tantalite) crystal materials. By regulating the thickness of the crystal materials, the absorption wavelength is adjustable as well by changing the depth of the anti-reflection cavity. To enhance the infrared absorption further, chemical corrosion is applied on this film, which generates a rough nano-scale surface structure and greatly increases the absorption surface area. By combining these two methods, absorption at specified infrared wavelength could be distinctly enhanced, and the manufacturing process is fully compatible and easy to realize. Experiment results suggest that the absorption performance which could be controlled agrees well with the simulation and design.