本文研究了液晶显示面板彩色滤光片工艺中以叠层方式形成隔垫物的关键技术问题, 即叠层隔垫物高度控制、主-附隔垫物段差的形成和主-附隔垫物段差受后续平坦层工艺的影响变化等, 并提出了解决方案。在黑矩阵、红色、绿色、蓝色滤光层形成一定的叠层高度后, 采用形貌追随型平坦化材料对像素区平坦, 通过控制像素开口部分OC的厚度, 可以实现叠层隔垫物高度的控制。采用改变叠层图案设计的方法形成主-副隔垫物高度差(Main-sub段差), 段差达成范围是0.4~1.2 μm, 达到了灰阶曝光方式可以达到段差的水平, 但成本却大幅降低。并且验证了采用形貌追随型OC材料覆盖可以较好的保持OC工艺前形成的Main-sub段差。基于以上技术制备了4 Mask彩色滤光片原型机。

The key issue of forming photo spacer by layer stacking on TFT-LCD CF substrate, such as height control, main-sub difference tuning and the variation of main-sub different after OC process is investigated. Corresponding solution has been proposed. A shape-following OC material is used to control PS height by tuning OC thickness, which indicates that the thickness of BM, Red, Green, Blue layer won’t has to be changed to achieve certain stacking height. The main-sub difference can be acquired by changing pattern size of each Stacking layers. The tuning range of main-sub difference is 04~12 μm, which already reaches the level of half tone mask technology, but at much lower cost. It is confirmed that the main-sub difference formed by BM/R/G/B layer stacking can be maintained after OC process. A prototype of 4 mask Color filter is fabricated, based on stacking photo spacer technology.