中国激光, 2018, 45 (1): 0104003, 网络出版: 2018-01-24
高精度激光追踪测量方法及实验研究 下载: 1215次
High-Precision Laser Tracking Measurement Method and Experimental Study
测量 激光追踪测量 光斑偏移量 闭环控制 高精度测量 measurement laser tracking measurement spot offset closed-loop control high-precision measurement
摘要
为满足现代工业各领域对高精度、大测量范围、实时性测量的要求, 提出一种高精度激光追踪测量方法, 来实现对随动目标的精密追踪测量。基于四象限探测器的激光追踪测量系统可实时地测量入射激光光斑相对于四象限探测器中心的偏移量, 利用响应速度快的伺服电机、可编程多轴运动控制器(PMAC)的运动控制卡构建闭环控制系统, 实现高精度快速激光追踪测量。实验结果表明, 所提出的高精度激光追踪测量方法实时性好、测量精度高; 当在激光光斑距离四象限探测器中心±1000 μm范围内追踪测量时, 光斑偏移量误差为31.2 μm, 激光光斑返回四象限探测器中心的平均时间为0.259 ms。
Abstract
In this paper, a high-precision laser tracking measurement method is proposed in order to meet the requirements of high measurement accuracy, large measurement range and real-time measurement in every filed of modern industry, which realizes precise tracking measurement of follow-up target. The laser tracking measurement system based on the four-quadrant detector can measure the incident laser spot offset that is relative to the center of the four-quadrant detector in real time. A fast response servo motor and the motion control card of programmable multi-axes controller (PMAC) are applied to build the closed-loop control system, which achieves high precision and fast laser tracking measurement. The experimental results show that the high-precision laser tracking measurement method proposed in this paper has good real-time performance and high measurement accuracy. When the tracking measurement of laser spot is within ±1000 μm away from the center of the four-quadrant detector, the error of spot offset is about 31.2 μm, and the average time of the laser spot returning the center of four-quadrant detector is 0.259 ms.
陈洪芳, 孙衍强, 王亚韦, 石照耀, 宋辉旭. 高精度激光追踪测量方法及实验研究[J]. 中国激光, 2018, 45(1): 0104003. Chen Hongfang, Sun Yanqiang, Wang Yawei, Shi Zhaoyao, Song Huixu. High-Precision Laser Tracking Measurement Method and Experimental Study[J]. Chinese Journal of Lasers, 2018, 45(1): 0104003.