激光与光电子学进展, 2018, 55 (2): 020004, 网络出版: 2018-09-10   

相移干涉技术及相移获取方法研究进展 下载: 1924次

Research Progresses of Phase-Shifting Interferometry Technology and Phase Shift Extraction Method
作者单位
江苏大学理学院, 江苏 镇江 212013
摘要
凭借非侵入、无损伤、高灵敏、高速率等优势,相移干涉技术已成为波前检测和相位测量的重要技术,也已被广泛应用于光学成像与测量等相关诸多领域。依据相移和光路特征对相移干涉技术进行了分类,对典型的时间相移和空间相移干涉技术进行了特征评析;继而依据相移技术的发展,列举了典型的相位恢复方法。针对发展的广义相移干涉技术,依据相移运算特征对各类典型相移获取方法进行了特征分类,继而讨论了广义相移获取方法中存在的问题和相应的解决方法。最后对相移干涉技术和相移获取方法的发展趋势作出了预测。
Abstract
Phase-shifting interferometry is an important technology in both wavefront and phase measurements by virtue of its advantages of non-invasive, no damage, high sensitivity and high speed. And phase-shifting interferometry technologies have been widely used in many fields related to the optical imaging and metrology. In this paper, according to the characteristics of the phase-shifting and optical path introduced in the imaging system, the phase-shifting interferometry technologies are classified. And the typical phase-shifting interferometry technologies in both cases of temporal and spatial domains are analyzed comparatively. Then, a lot of typical phase retrieval methods are listed, on the basis of the development of the phase-shifting interferometry technology. For the general phase-shifting interferometry technologies, typical phase shift extraction methods are classified according to the characteristic of phase shift. Then, aiming at the common problems existing in the general phase shift extraction methods, the corresponding solutions are discussed. At last, the trends of the phase-shifting interferometry technology and phase-shifting extraction method are predicted.

徐媛媛, 时刻, 王亚伟, 刘景业, 朱琼, 尚梦园, 潘熳颖. 相移干涉技术及相移获取方法研究进展[J]. 激光与光电子学进展, 2018, 55(2): 020004. Yuanyuan Xu, Ke Shi, Yawei Wang, Jingye Liu, Qiong Zhu, Mengyuan Shang, Manying Pan. Research Progresses of Phase-Shifting Interferometry Technology and Phase Shift Extraction Method[J]. Laser & Optoelectronics Progress, 2018, 55(2): 020004.

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