利用时域有限差分法,仿真设计了三组具有不同中心频率的十字形太赫兹带通滤波器,并搭建了飞秒激光微加工系统,在单层铝箔上实现了无衬底太赫兹滤波器的加工。利用时域太赫兹光谱系统,对所加工的器件进行了透射率测试,实验和仿真结果高度吻合,所加工的太赫兹滤波器中心频率处的透射率为85%以上,达到商业化太赫兹滤波器水平。

Three groups of cross-shaped terahertz band-pass filters with different central frequencies are designed by using the finite difference time domain method. A femtosecond laser micro-machining system is built and the substrateless terahertz filter on a single-layered aluminum foil is fabricated. The transmissivities of these band-pass filters are tested by using the time-domain terahertz spectroscopy system. The experimental results are in a good agreement with the simulated results. All the transmissivities at central frequencies of these filters are over 85%, which reaches the commercial level of terahertz filters.