Chinese Optics Letters, 2018, 16 (3): 031201, Published Online: Jul. 13, 2018
Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape Download: 715次
Abstract
This Letter demonstrates a novel lateral shear interferometer system for simultaneous measurement of three-dimensional (3D) shape and thickness of transparent objects. Multi-frequency fringe patterns can be created by tilting mirrors at different inclination angles. With a single camera, the multi-frequency fringes are recorded in one image. The phase-shift of the fringes can be generated synchronously only by moving a plane-parallel plate along an in-plane parallel direction. According to the feature of transparent materials, the thickness and 3D shape can be reconstructed simultaneously based on the relationship between the in-plane displacement and their characteristics. The experiment was conducted on a thin transparent film subjected to a shearing force, which verifies the feasibility of the proposed system.
Xiangjun Dai, Tianyu Yuan, Hanyang Jiang, Xinxing Shao, Meiling Dai, Hai Yun, Fujun Yang, Xiaoyuan He. Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and three-dimensional shape[J]. Chinese Optics Letters, 2018, 16(3): 031201.