光学学报, 2018, 38 (3): 0304001, 网络出版: 2018-03-20
滤波器增强的高灵敏度室温HEMT太赫兹探测器 下载: 979次
Filter-Enhanced High-Sensitivity HEMT Terahertz Detector at Room Temperature
探测器 太赫兹 高电子迁移率晶体管 滤波器 扫描成像 detector terahertz high electron mobility transistor (HEMT) filter terahertz imaging
摘要
制备了一种集成有太赫兹低通滤波器的高速、高灵敏度GaN/AlGaN高电子迁移率晶体管(HEMT)太赫兹探测器。实验研究表明, 当在太赫兹天线与引线电极之间加入低通滤波器时, 太赫兹耦合天线的谐振性能恢复, 室温下器件的响应度达到了1.05×103 V/W;测试带宽为1 Hz时, 器件的噪声等效功率达到了4.7×10-11 W。利用该探测器单元对不同材料进行了快速扫描成像, 结果表明, 该探测器单元具有较好的成像分辨率, 且器件的响应速度优于商用的气动探测器的和热释电探测器的。
Abstract
A terahertz detector of GaN/AlGaN high electron mobility transistor (HEMT) with a high speed and a high sensitivity integrated with low-pass filters is fabricated.The experimental study indicates that, when the low-pass filters are added between the terahertz antennas and the lead electrode, the resonance performance of THz coupled antenna is restored. At the room temperature, the responsivity of the device reaches 1.05×103 V·W-1, and the noise equivalent power reaches 4.7×10-11 W when the bandwidth is 1 Hz. This detector unit is used for the fast scanning imaging of different materials, and the results show that this detector unit has a high imaging resolution and its response speed is superior to those of the commercial pneumatic detectors and pyroelectric detectors.
孙云飞, 陶重犇, 孙建东, 秦华, 班建民, 罗恒. 滤波器增强的高灵敏度室温HEMT太赫兹探测器[J]. 光学学报, 2018, 38(3): 0304001. Sun Yunfei, Tao Chongben, Sun Jiandong, Qin Hua, Ban Jianmin, Luo Heng. Filter-Enhanced High-Sensitivity HEMT Terahertz Detector at Room Temperature[J]. Acta Optica Sinica, 2018, 38(3): 0304001.