光电技术应用, 2018, 33 (1): 71, 网络出版: 2018-04-23   

光栅与基片的连接对光纤光栅压力传感器的影响

Influence of Connection of Grating and Substrate on Fiber Grating Pressure Sensor
作者单位
1 承德石油高等专科学校 河北省仪器仪表工程技术研究中心, 河北 承德 067000
2 河北地质大学 光电技术研究所, 石家庄 050700
摘要
光纤光栅压力传感器中光栅与金属基片的连接方法主要分为胶装工艺与金属化封装工艺, 工艺不同传感器会出现蠕变等现象, 也会直接影响传感器的测量精度。对自主设计的悬臂梁式光纤光栅压力传感器进行实验结果显示, 采用金属化封装工艺和353ND胶封装工艺制作的光纤光栅压力传感器其压力与波长的线性拟合度均高于0.998, 使用353ND胶与钢质金属基片胶装的光纤光栅压力传感器在0~6 MPa压力范围内, 在5 min内由于悬臂梁弯曲所造成的最大波长偏移为8 pm; 研究还表明, 同一结构金属化光纤光栅压力传感器其灵敏度是使用353ND胶制成的裸光纤光栅传感器的3.4倍。
Abstract
The connection between the grating and the metal substrate in the fiber grating pressure sensor is mainly divided into the adhesive process and the metallized packaging process. The creep of the sensor will be caused by different processes. It will also directly affect the measurement accuracy of the sensor. Experiments of the self designed cantilever beam fiber Bragg grating pressure sensor are performed, and the experimental results show that the linear fitting of the pressure and wavelength of the fiber Bragg grating pressure sensor made by the metallized packaging technology and the 353ND glue packaging process are both higher than 0.998. The fiber Bragg grating pressure sensor with 353ND glue and steel metal substrate is within the 0~6 MPa pressure range. The maximum wavelength shift caused by the bending of the cantilever beam in 5 min is 8 pm. The research also shows that the sensitivity of the same structure metallized fiber Bragg grating pressure sensor is 3.4 times than that of the bare fiber grating sensor with 353ND glue.

杨洋, 郑一博, 杨洋, 刘兵, 赵亚丽. 光栅与基片的连接对光纤光栅压力传感器的影响[J]. 光电技术应用, 2018, 33(1): 71. YANG Yang, ZHENG Yi-bo, YANG Yang, LIU Bing, ZHAO Ya-li. Influence of Connection of Grating and Substrate on Fiber Grating Pressure Sensor[J]. Electro-Optic Technology Application, 2018, 33(1): 71.

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